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Volumn 3, Issue 1, 2011, Pages 96-120

Nanomechanical architecture of semiconductor nanomembranes

Author keywords

[No Author keywords available]

Indexed keywords

3D STRUCTURE; BOTTOM-UP AND TOP-DOWN; ELASTIC STRAIN RELAXATION; NANOMEMBRANES; POTENTIAL APPLICATIONS; QUASI-3D; SEMICONDUCTOR PROCESSING; SHAPE CHANGE; THREE-DIMENSIONAL (3D); TOPDOWN;

EID: 78651511024     PISSN: 20403364     EISSN: 20403372     Source Type: Journal    
DOI: 10.1039/c0nr00648c     Document Type: Review
Times cited : (84)

References (99)
  • 39
    • 33746006856 scopus 로고    scopus 로고
    • A. Cho Science 2006 313 164
    • (2006) Science , vol.313 , pp. 164
    • Cho, A.1
  • 96
  • 99
    • 78651508167 scopus 로고    scopus 로고
    • private communication
    • M. Yu and R. H. Blick, private communication
    • Yu, M.1    Blick, R.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.