Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils

Semiconductor Science and Technology

Volumn 16, Issue 3, 2001, Pages 181-185

  Golod, S V ^a   Prinz, V Ya ^a   Mashanov, V I ^a   Gutakovsky, A K ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; ETCHING; FABRICATION; ION BEAM LITHOGRAPHY; NANOTUBES; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON; SUBSTRATES; THIN FILMS;

HELICAL MICROCOILS;

HETEROJUNCTIONS;

EID: 0035280720     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/16/3/311     Document Type: Article

References (12)