Directional scrolling of hetero-films on Si(1 1 0) and Si(1 1 1) surfaces

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1233-1236

  Zhang, L ^a   Deckardt, E ^a   Weber, A ^a   Schonenberger C ^b   Grutzmacher D ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

Anisotropic underetching; Micro tube; Scrolling; Si(1 1 0); Si(1 1 1)

Indexed keywords

ANISOTROPY; ETCHING; HETEROJUNCTIONS; NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES;

ANISOTROPIC UNDERETCHING; MICRO-TUBE; SCROLLING; SI(1 1 0);

THIN FILMS;

EID: 33646037995     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.128     Document Type: Article

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