Fabrication of arrays of large step-free regions on Si(001)

Applied Physics Letters

Volumn 69, Issue 9, 1996, Pages 1235-1237

  Tanaka, So ^a   Umbach, C C ^a   Blakely, Jack M ^a   Tromp, Ruud M ^b   Mankos, M ^b  

^a Cornell University   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001733413     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117422     Document Type: Article

References (17)

1. Y. Samitsu, Nanotechnology 4, 236 (1993).
2. T. Ohmi, K. Kotani, A. Teramoto, and M. Miyashita, IEEE Electron Device Lett. 12, 652 (1991).
3. R. M. Tromp and M. C. Reuter, Phys. Rev. Lett. 47, 7598 (1993).
4. M. E. Keeffe, C. C. Umbach, and J. M. Blakely, J. Phys. Chem. Solids 55, 965 (1994).
5. Q. Shen, C. C. Umbach, B. Weselak, and J. M. Blakely, Phys. Rev. B 48, 17 967 (1993).
6. S. Tanaka, C. C. Umbach, and J. M. Blakely, Appl. Phys. Lett. 68, 1967 (1996).
7. S. Tanaka, C. C. Umbach, J. M. Blakely, and R. M. Tromp, Cornell MSC Report No. 7995, 1995 (unpublished).
8. S. Tanaka, C. C. Umbach, and J. M. Blakely, Cornell MSC Report No. 7999, 1995 (submitted to Surf. Sci. Lett.).
9. A. Ishizaka and Y. Shiraki, J. Electrochem. Soc. 133, 666 (1986).
10. R. M. Tromp and M. C. Reuter, Ultramicroscopy 50, 7598 (1993).
11. N. C. Bartelt, R. M. Tromp, and E. D. Williams, Phys. Rev. Lett. 73, 1656 (1994).
12. J. E. Griffith and G. P. Kochanski, CRC Crit. Rev. Solid State Mater. Sci. 16, 255 (1990).
13. S. M. Gates and C. M. Chiang, Chem. Phys. Lett. 184, 448 (1991).
14. J. J. Metois and D. E. Wolf. Surf. Sci. 298, 71 (1993).
15. W. Theis, N. C. Bartelt, and R. M. Tromp, Phys. Rev. Lett. 75, 3328 (1995).
16. C. C. Umbach, M. E. Keeffe, and J. M. Blakely, J. Vac. Sci. Technol. A 11, 1830 (1993).
17. A. V. Latyshev, A. B. Krasil'nikov, A. L. Aseev, and S. I. Stenin, JETP Lett. 48, 526 (1988).