Ultra flexible SiGe/Si/Cr nanosprings

Microelectronics Journal

Volumn 39, Issue 3-4, 2008, Pages 478-481

  Grutzmacher D ^a   Zhang, L ^b   Dong, L ^b   Bell, D ^b   Nelson, B ^b   Prinz, A ^c   Ruh, E ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b ETH ZURICH   (Switzerland)

^c INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Mechanical properties; NEMS; Rolled up nanostructures; Self assembled SiGe nanostructures

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; FORCE MEASUREMENT; MICROMANIPULATORS; NANOSTRUCTURES;

LINEAR DEPENDENCE; NANOSPRINGS; ORIGINAL LENGTH; SPRING CONSTANT;

SPRINGS (COMPONENTS);

EID: 40649099374     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.07.089     Document Type: Article

References (11)

1. Prinz V.Y., Seleznev V.A., Gutakovsky A.K., Chehovskiy A.V., Preobrazhenskii V.V., Putyato M.A., and Gavrilova T.A. Physica E 6 (2000) 828
2. Prinz V.Y., Grützmacher D., Beyer A., David C., Ketterer B., and Deckardt E. Nanotechnology 12 (2001) 399
3. Bell D.J., Bauert T.E., Zhang L., Dong L.X., Sun Y., Grützmacher D., and Nelson B.J. Nanotechnology 18 (2007) 055304
4. Schmidt O.G., and Eberl K. Nature 410 (2001) 168
5. Golod S.V., Prinz V.Y., Wägli P., Zhang L., Kirfel O., Deckhardt E., Glaus F., David C., and Grützmacher D. Appl. Phys. Lett. 84 (2004) 3391
6. Zhang L., Ruh E., Grützmacher D., Dong L.X., Bell D.J., Nelson B.J., and Schönenberger C. Nano Lett. 6 (2006) 1311
7. Grundmann M. Appl. Phys. Lett. 83 (2003) 2444
8. Zhang L., Deckhardt E., Weber A., Schönenberger C., and Grützmacher D. Nanotechnology 16 (2005) 655
9. Chen X.Q., Zhang S.L., Dikin D.A., Ding W.Q., Ruoff R.S., Pan L.J., and Nakayama Y. Nano Lett. 3 (2003) 1299
10. Bell D.J., Dong L.X., Zhang L., Golling M., Nelson B.J., and Grützmacher D. Nano Lett. 6 (2006) 725
11. Gao P.M., Ding Y., Mai W.J., Hughes W.L., Lao C.S., and Wang Z.L. Science 309 (2005) 1700