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Applied Physics Letters

Volumn 93, Issue 14, 2008, Pages

Fabrication and electrical characterization of Si-based rolled-up microtubes

(3) Cavallo, F a,b Songmuang, R a,c Schmidt, O G b

a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG (Germany)

b IFW DRESDEN (Germany)

c CEA LETI (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC PROPERTIES; GERMANIUM; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SILICON; SILICON ALLOYS;

BI LAYERS; BILAYER THICKNESS; ELECTRICAL CHARACTERIZATIONS; ELECTRICAL PROPERTIES; ELECTRICAL RESISTANCES; GE INTERDIFFUSION; I-V CURVES; MICRO-TUBES; SI-BASED; THERMAL ANNEALING;

TUBES (COMPONENTS);

EID: 53649101070 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2992195 Document Type: Article

Times cited : (46)

References (32)

1
- 0034138563
- V. Y. Prinz, V. A. Seleznev, A. K. Gutakovsky, A. V. Chehovskiy, V. V. Preobrazhenskii, M. A. Putyato, and T. A. Gavrilova, Physica E (Amsterdam) 6, 828 (2000).
- (2000) Physica e (Amsterdam) , vol.6 , pp. 828
- Prinz, V.Y.¹ Seleznev, V.A.² Gutakovsky, A.K.³ Chehovskiy, A.V.⁴ Preobrazhenskii, V.V.⁵ Putyato, M.A.⁶ Gavrilova, T.A.⁷

2
- 0035826219
- O. G. Schmidt and K. Eberl, Nature (London) 410, 168 (2001).
- (2001) Nature (London) , vol.410 , pp. 168
- Schmidt, O.G.¹ Eberl, K.²

3
- 0035280720
- S. V. Golod, V. Y. Prinz, V. I. Mashanov, and A. K. Gutakovsky, Semicond. Sci. Technol. 16, 181 (2001).
- (2001) Semicond. Sci. Technol. , vol.16 , pp. 181
- Golod, S.V.¹ Prinz, V.Y.² Mashanov, V.I.³ Gutakovsky, A.K.⁴

4
- 18744388569
- L. Zhang, E. Deckhardt, A. Weber, C. Schönenberger, and D. Grützmacher, Nanotechnology 16, 655 (2005).
- (2005) Nanotechnology , vol.16 , pp. 655
- Zhang, L.¹ Deckhardt, E.² Weber, A.³ Schönenberger, C.⁴ Grützmacher, D.⁵

5
- 30744447218
- R. Songmuang, N. Y. Jin-Phillipp, S. Mendach, and O. G. Schmidt, Appl. Phys. Lett. 88, 021913 (2006).
- (2006) Appl. Phys. Lett. , vol.88 , pp. 021913
- Songmuang, R.¹ Jin-Phillipp, N.Y.² Mendach, S.³ Schmidt, O.G.⁴

6
- 33751564660
- R. Songmuang, Ch. Deneke, and O. G. Schmidt, Appl. Phys. Lett. 89, 223109 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 223109
- Songmuang, R.¹ Deneke, Ch.² Schmidt, O.G.³

7
- 0035926983
- O. G. Schmidt and N. Y. Jin-Philipp, Appl. Phys. Lett. 78, 3310 (2001).
- (2001) Appl. Phys. Lett. , vol.78 , pp. 3310
- Schmidt, O.G.¹ Jin-Philipp, N.Y.²

8
- 29144497242
- M. Huang, C. Boone, M. Roberts, D. E. Savage, M. G. Lagally, N. Shaji, H. Qin, R. Blick, J. A. Nairn, and F. Liu, Adv. Mater. (Weinheim, Ger.) 17, 2860 (2005).
- (2005) Adv. Mater. (Weinheim, Ger.) , vol.17 , pp. 2860
- Huang, M.¹ Boone, C.² Roberts, M.³ Savage, D.E.⁴ Lagally, M.G.⁵ Shaji, N.⁶ Qin, H.⁷ Blick, R.⁸ Nairn, J.A.⁹ Liu, F.¹⁰

9
- 34248393482
- F. Cavallo, R. Songmuang, C. Ulrich, and O. G. Schmidt, Appl. Phys. Lett. 90, 193120 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 193120
- Cavallo, F.¹ Songmuang, R.² Ulrich, C.³ Schmidt, O.G.⁴

10
- 33847611469
- R. Songmuang, A. Rastelli, S. Mendach, and O. G. Schmidt, Appl. Phys. Lett. 90, 0919051 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 0919051
- Songmuang, R.¹ Rastelli, A.² Mendach, S.³ Schmidt, O.G.⁴

11
- 51349137013
- A. Bernardi, S. Kiravittaya, A. Rastelli, R. Songmuang, D. J. Thurmer, M. Benyoucef, and O. G. Schmidt, Appl. Phys. Lett. 93, 094106 (2008).
- (2008) Appl. Phys. Lett. , vol.93 , pp. 094106
- Bernardi, A.¹ Kiravittaya, S.² Rastelli, A.³ Songmuang, R.⁴ Thurmer, D.J.⁵ Benyoucef, M.⁶ Schmidt, O.G.⁷

12
- 45749094969
- L. Zhang, L. Dong, and B. J. Nelson, Appl. Phys. Lett. 92, 243102 (2008).
- (2008) Appl. Phys. Lett. , vol.92 , pp. 243102
- Zhang, L.¹ Dong, L.² Nelson, B.J.³

13
- 2942606508
- W. Liu and M. Ashenghi, Appl. Phys. Lett. 84, 3819 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 3819
- Liu, W.¹ Ashenghi, M.²

14
- 33947312728
- A. Shakouri, Proc. IEEE 94, 1613 (2006).
- (2006) Proc. IEEE , vol.94 , pp. 1613
- Shakouri, A.¹

15
- 38149119711
- L. F. Houlet, W. Shin, M. Nishibori, N. Izu, T. Itoh, and I. Matsubara, Sens. Actuators B 129, 1 (2008).
- (2008) Sens. Actuators B , vol.129 , pp. 1
- Houlet, L.F.¹ Shin, W.² Nishibori, M.³ Izu, N.⁴ Itoh, T.⁵ Matsubara, I.⁶

16
- 0025419446
- 0924-4247 10.1016/0924-4247(90)87084-V.
- U. Schnakenberg, W. Benecke, and B. Loechel, Sens. Actuators A 0924-4247 10.1016/0924-4247(90)87084-V 21, 1031 (1990).
- (1990) Sens. Actuators A , vol.21 , pp. 1031
- Schnakenberg, U.¹ Benecke, W.² Loechel, B.³

17
- 0025519505
- H. Seidel, L. Csepregi, A. Heuberger, and H. Buamgaertel, J. Electrochem. Soc. 137, 3626 (1990).
- (1990) J. Electrochem. Soc. , vol.137 , pp. 3626
- Seidel, H.¹ Csepregi, L.² Heuberger, A.³ Buamgaertel, H.⁴

18
- 0028439209
- D. Ladheer, J. A. Bardwell, and K. B. Clark, J. Electrochem. Soc. 141, 11309 (1994).
- (1994) J. Electrochem. Soc. , vol.141 , pp. 11309
- Ladheer, D.¹ Bardwell, J.A.² Clark, K.B.³

19
- 0033328014
- H. Fujii, S. Kanemaru, T. Matsukawa, and J. Itoh, Jpn. J. Appl. Phys., Part 1 38, 7237 (1999).
- (1999) Jpn. J. Appl. Phys., Part 1 , vol.38 , pp. 7237
- Fujii, H.¹ Kanemaru, S.² Matsukawa, T.³ Itoh, J.⁴

20
- 0032676703
- T. Maeda, E. Suzuki, I. Sakata, M. Yamanaka, and K. Ishii, Nanotechnology 10, 127 (1999).
- (1999) Nanotechnology , vol.10 , pp. 127
- Maeda, T.¹ Suzuki, E.² Sakata, I.³ Yamanaka, M.⁴ Ishii, K.⁵

21
- 33744540414
- I. Kimukin, M. Saif Islam, and R. Stanley Williams, Nanotechnology 17, 240 (2006).
- (2006) Nanotechnology , vol.17 , pp. 240
- Kimukin, I.¹ Saif Islam, M.² Stanley Williams, R.³

22
- 0032652007
- R. Duschl, O. G. Schmidt, G. Reitemann, E. Kasper, and K. Eberl, Electron. Lett. 35, 1111 (1999).
- (1999) Electron. Lett. , vol.35 , pp. 1111
- Duschl, R.¹ Schmidt, O.G.² Reitemann, G.³ Kasper, E.⁴ Eberl, K.⁵

23
- 0142026428
- M. Grundmann, Appl. Phys. Lett. 83, 2444 (2003).
- (2003) Appl. Phys. Lett. , vol.83 , pp. 2444
- Grundmann, M.¹

24
- 0008810860
- T. E. Jackman, J.-M. Baribeau, D. J. Lockwood, P. Aebi, T. Tyliszczak, and A. P. Hitchcock, Phys. Rev. B 45, 13591 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 13591
- Jackman, T.E.¹ Baribeau, J.-M.² Lockwood, D.J.³ Aebi, P.⁴ Tyliszczak, T.⁵ Hitchcock, A.P.⁶

25
- 0035473542
- S. J. Koester and M. A. Hargrove, Appl. Phys. Lett. 79, 2148 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 2148
- Koester, S.J.¹ Hargrove, M.A.²

26
- 4344659561
- L. H. Wong, C. C. Wong, K. K. Ong, J. P. Liu, L. Chan, R. Rao, K. L. Pey, L. Liu, and Z. X. Chen, Thin Solid Films 462, 76 (2004).
- (2004) Thin Solid Films , vol.462 , pp. 76
- Wong, L.H.¹ Wong, C.C.² Ong, K.K.³ Liu, J.P.⁴ Chan, L.⁵ Rao, R.⁶ Pey, K.L.⁷ Liu, L.⁸ Chen, Z.X.⁹

27
- 0035868207
- A. Shima, T. Jinbo, N. Natsuaki, J. Ushio, J.-H. Oh, K. Ono, and M. Oshima, J. Appl. Phys. 89, 3458 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 3458
- Shima, A.¹ Jinbo, T.² Natsuaki, N.³ Ushio, J.⁴ Oh, J.-H.⁵ Ono, K.⁶ Oshima, M.⁷

28
- 0035249854
- H. C.-H. Wang, C.-C. Wang, C.-S. Chang, T. Wang, P. B. Griffin, and C. H. Diaz, IEEE Electron Device Lett. 22, 65 (2001).
- (2001) IEEE Electron Device Lett. , vol.22 , pp. 65
- Wang, H.C.-H.¹ Wang, C.-C.² Chang, C.-S.³ Wang, T.⁴ Griffin, P.B.⁵ Diaz, C.H.⁶

29
- 0038645959
- R. Duffy, V. C. Venezia, A. Heringa, T. W. T. Hüsken, M. J. P. Hopstaken, N. E. B. Cowern, P. B. Griffin, and C. C. Wang, Appl. Phys. Lett. 82, 3647 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 3647
- Duffy, R.¹ Venezia, V.C.² Heringa, A.³ Hüsken, T.W.T.⁴ Hopstaken, M.J.P.⁵ Cowern, N.E.B.⁶ Griffin, P.B.⁷ Wang, C.C.⁸

30
- 0010992796
- F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, and H. Möller, Sens. Actuators B 64, 95 (2000).
- (2000) Sens. Actuators B , vol.64 , pp. 95
- Solzbacher, F.¹ Imawan, C.² Steffes, H.³ Obermeier, E.⁴ Möller, H.⁵

31
- 0343289075
- I. Simon, N. Barsan, M. Bauer, and U. Weimar, Sens. Actuators B 73, 1 (2001).
- (2001) Sens. Actuators B , vol.73 , pp. 1
- Simon, I.¹ Barsan, N.² Bauer, M.³ Weimar, U.⁴

32
- 33847359977
- 0924-4247 10.1016/j.sna.2006.06.014.
- N.-C. Tsai and C.-Y. Sue, Sens. Actuators A 0924-4247 10.1016/j.sna.2006.06.014 134, 555 (2007).
- (2007) Sens. Actuators A , vol.134 , pp. 555
- Tsai, N.-C.¹ Sue, C.-Y.²

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