Fabrication and current-drive of SiGe/Si 'Micro-origami' epitaxial MEMS device on SOI substrate

Electronics Letters

Volumn 40, Issue 21, 2004, Pages 1333-1334

  Tokuda, T ^a   Sakano, Y ^a   Mori, D ^a   Ohta, J ^a   Nunoshita, M ^a   Vaccaro, P O ^b   Vorob'ev, A ^b   Kubota, K ^b   Saito, N ^b  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOLECULAR BEAM EPITAXY; OPTOELECTRONIC DEVICES; SEMICONDUCTOR MATERIALS; SILICON ON INSULATOR TECHNOLOGY; VOLTAGE MEASUREMENT;

FABRICATION TECHNIQUES; HETEROEPITAXIAL LAYER; MECHANICAL SWINGING; MICROMIRROR;

SILICON COMPOUNDS;

EID: 7544232783     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20046143     Document Type: Article

References (6)

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3. Vaccaro, P.O., Kubota, K., and Aida, T.: 'Strain-driven self-positioning of micromachined structures', Appl. Phys. Lett., 2001, 78, pp. 2852-2854
4. Prinz, V.Y., Seleznev, V.A., Gutakovsky, A.K., Chehovskiy, A.V., Preobrazhenskii, V.V., Putyato, M.A., and Gavrilova, T.A.: 'Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays', Physica E, 2000, 6, p. 828
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6. Vorob'ev, V., Vaccaro, P.O., Kubota, K., Aida, T., Tokuda, T., Hayashi, T., Sakano, Y., Ohta, J., and Nunoshita, M.: 'SiGe/Si microtubes fabricated on a silicon-on-insulator substrate', J. Phys. D, Appl. Phys., 2003, 36, pp. L67-L69