Theory of bending of Si nanocantilevers induced by molecular adsorption: A modified Stoney formula for the calibration of nanomechanochemical sensors

Nanotechnology

Volumn 18, Issue 40, 2007, Pages

  Zang, Ji ^a   Liu, Feng ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ADSORPTION; BENDING (DEFORMATION); CHEMICAL SENSORS; CHEMISORPTION; CONTINUUM MECHANICS; SILICON; STRESSES;

ATOMISTIC SIMULATIONS; NANOFILMS; NANOMECHANOCHEMICAL SENSORS; STONEY FORMULAS;

NANOCANTILEVERS;

ACETYLENE; HYDROGEN; SILICON;

ADSORPTION; ARTICLE; ATOM; BIOSENSOR; CALIBRATION; MOLECULE; PRIORITY JOURNAL; QUANTUM THEORY; SIMULATION; SURFACE STRESS;

EID: 34748907779     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/40/405501     Document Type: Article

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