Rolling up SiGe on insulator

Applied Physics Letters

Volumn 90, Issue 19, 2007, Pages

  Cavallo, F ^a   Songmuang, R ^a,b   Ulrich, C ^a   Schmidt, O G ^a,c  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b CEA LETI   (France)

^c IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION; CONTINUUM MECHANICS; GERMANIUM; SILICON COMPOUNDS; STRAIN RATE;

INSULATOR FILMS; MICROTUBES; STRAIN DISTRIBUTION; TUBE DIAMETERS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 34248393482     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2737425     Document Type: Article

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