A unique approach to reveal the nanocomposite nc-MN/SiN-layer architecture of thin films via electrical measurements

Surface and Coatings Technology

Volumn 204, Issue 12-13, 2010, Pages 1907-1913

  Sandu, C S ^a   Harada, S ^a   Sanjines R ^b   Cavaleiro, A ^c  

^a Ceramics Laboratory Ecole Polytechnique Federale de Lausanne   (Switzerland)

^b EPFL   (Switzerland)

^c UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Electrical conductivity; Metallic nitride; Nanocomposite; SiN

Indexed keywords

AMORPHOUS PHASE; CHEMICAL COMPOSITIONS; CHEMICAL INERTNESS; DEPOSITION CONDITIONS; ELECTRICAL AND MECHANICAL PROPERTIES; ELECTRICAL CONDUCTIVITY; ELECTRICAL MEASUREMENT; ELECTRICAL RESISTIVITY; EXPERIMENTAL DETERMINATION; GRAIN SURFACE; HIGH DEPOSITION RATES; LOW TEMPERATURES; METALLIC NITRIDE; NANOCOMPOSITE FILM; NANOCOMPOSITE MATERIALS; NANOCOMPOSITE THIN FILMS; NITROGEN PRESSURE; SMALL CONCENTRATION; TEM; TERNARY PHASE; THERMAL STABILITY; THIN LAYERS; TRANSITION METAL NITRIDES;

CHEMICAL STABILITY; CRYSTALLITES; ELECTRIC PROPERTIES; ELECTRON ENERGY LEVELS; MECHANICAL PROPERTIES; MONOLAYERS; NANOCOMPOSITES; SILICON NITRIDE; SURFACE CHEMISTRY; THIN FILMS; TITANIUM NITRIDE; TRANSITION METALS;

ELECTRIC CONDUCTIVITY OF SOLIDS;

EID: 76349096472     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.11.045     Document Type: Article

References (40)

1. Diserens M., Patscheider J., and Lévy F. Surf. Coat. Technol. 108-109 (1998) 241
2. Veprek S. J. Vac. Sci. Technol. A 17 (1999) 2401
3. Musil J. Surf. Coat. Technol. 125 (2000) 322
4. Veprek S., and Veprek-Heijman M.J.G. Surf. Coat. Technol. 202 (2008) 5063
5. Chung C.K., and Chen T.S. J. Lumin. 129 (2009) 370
6. Veprek S., Veprek-Heijman M.G.J., Karvankova P., and Prochazka J. Thin Solid Films 476 (2005) 1
7. Pilloud D., Pierson J.F., Marques A.P., and Cavaleiro A. Surf. Coat. Technol. 180-181 (2004) 352
8. Chapusot V., Pierson J.F., Lapostolle F., and Billard A. Mater. Chem. Phys. 114 (2009) 780
9. Pierson J.F., Bertran F., Bauer J.P., and Jolly J. Surf. Coat. Technol. 142-144 (2001) 906
10. Park J.H., Chung W.S., Cho Y.-R., and Kim K.H. Surf. Coat. Technol. 188-189 (2004) 425
11. Nose M., and Chiou W.A. J. Vac. Sci. Technol., A 20 3 (2002) 823
12. Sandu C.S., Sanjinés R., Benkahoul M., Medjani F., and Lévy F. Surf. Coat. Technol. 201 (2006) 4083
13. Perez-Mariano J., Lau K.-H., Sanjurjo A., Caro J., Casellas D., and Colominas C. Surf. Coat. Technol. 201 (2006) 2217
14. Sanjinés R., Benkahoul M., Sandu C.S., and Lévy F. J. Appl. Phys. 98 (2005) 123511
15. Sandu C.S., Benkahoul M., Sanjinés R., and Lévy F. Surf. Coat. Technol. 201 (2006) 2897
16. Sandu C.S., Medjani F., Sanjinés R., Karimi A., and Lévy F. Surf. Coat. Technol. 201 (2006) 4219
17. Sandu C.S., Sanjinés R., and Medjani F. Surf. Coat. Technol. 202 (2008) 2278
18. Houska J., Klemberg-Sapieha J.E., and Martinu L. Surf. Coat. Technol. 203 (2009) 3348
19. Sandu C.S., Medjani F., and Sanjinés R. Rev. Adv. Mater. Sci. 15 (2007) 173
20. Vaz F., Rebouta L., Goudeau Ph., Girardeau T., Pacaud J., and Riviére J.P. Surf. Coat. Technol. 146-147 (2001) 274
21. Ribeiro E., Rebouta L., Carvalho S., Vaz F., Fuentes G.G., Rodriguez R., Zazpe M., Alves E., Goudeau Ph., and Riviere J.P. Surf. Coat. Technol. 188-189 (2004) 351
22. Yang Z.T., Yang B., Guo L.P., and Fu D.J. J. Alloys Compd. 473 (2009) 437
23. Sandu C.S., Cusnir N., Oezer D., Sanjinés R., and Patscheider J. Surf. Coat. Technol. 204 (2009) 969
24. Christiansen S., Albrecht M., Strunk H.P., and Veprek S. J. Vac. Sci. Technol. B16 (1998) 19
25. Veprek S., and Reiprich S. Thin Solid Films 268 (1995) 64
26. Benkahoul M., Sandu C.S., Tabet N., Parlinska-Wojtan M., Karimi A., and Levy F. Surf. Coat. Technol. 188-189 (2004) 435
27. Flink A., Larsson T., Sjolen J., Karlsson L., and Hultman L. Surf. Coat. Technol. 200 (2005) 1535
28. Söderberg H., Odén M., Molina-Aldareguia J.M., and Hultman L. J. Appl. Phys. 97 (2005) 114327
29. Söderberg H., Molina-Aldareguia J.M., Larrsson T., Hultman L., and Odén M. Appl. Phys. Lett. 88 (2006) 191902
30. Pilloud D., Pierson J.F., and Pichon L. Mater. Sci. Eng. B 131 (2006) 36
31. Pierson J.F., Bertran F., Bauer J.P., and Jolly J. Surf. Coat. Technol. 142-144 (2001) 906
32. Jedrzejowski P., Baloukas B., Klemberg-Sapieha J.E., and Martinu L. J. Vac. Sci. Technol. A 22 (2004) 725
33. Reiss G., Vancea J., and Hoffmann H. Phys. Rev. Lett. 56 (1986) 2100
34. Tyan J.-H., and Lue J.T. J. Appl. Phys. 75 (1994) 325
35. Sandu C.S., Sanjinés R., Benkahoul M., Parlinska-Wojtan M., Karimi A., and Lévy F. Thin Solid Films 496 (2006) 336
36. Piedade A.P., Gomes M.J., Pierson J.F., and Cavaleiro A. Surf. Coat. Technol. 200 (2006) 6303
37. Abad M.D., Sánchez-López J.C., Cusnir N., and Sanjines R. J. Appl. Phys. 105 (2009) 033510
38. Martinez E., Sanjinés R., Banakh O., and Lévy F. Thin Solid Films 447-448 (2004) 332
39. Yeh W.-k., and Lin C.-y. Thin Solid Films 419 (2002) 218
40. Hultman L., Bareño J., Flink A., Söderberg H., Larsson K., Petrova V., Odén M., and Petrov I. Phys. Rev. B Phys. 75 (2007) 155437