Characterization of W-Ge-N coatings deposited by sputtering

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6303-6307

  Piedade, A P ^a   Gomes, M J ^a   Pierson, J F ^b   Cavaleiro, A ^a  

^a UNIVERSITY OF COIMBRA   (Portugal)

^b UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Mechanical properties; Structure; Tungsten nitride; W based coatings; W Ge N

Indexed keywords

COMPOSITION EFFECTS; GERMANIUM; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; PRESSURE EFFECTS; RESIDUAL STRESSES; SURFACE TREATMENT;

NITROGEN CONTENT; TUNGSTEN NITRIDE; TUNGSTEN-BASED COATINGS;

TUNGSTEN COMPOUNDS;

COMPOSITION EFFECTS; GERMANIUM; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; PRESSURE EFFECTS; RESIDUAL STRESSES; SURFACE TREATMENT; TUNGSTEN COMPOUNDS;

EID: 33748191710     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.019     Document Type: Article

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