Control of morphology (ZrN crystallite size and SiNx layer thickness) in Zr-Si-N nanocomposite thin films

Surface and Coatings Technology

Volumn 202, Issue 11, 2008, Pages 2278-2281

  Sandu, C S ^a   Sanjines R ^a   Medjani, F ^a  

^a EPFL   (Switzerland)

Author keywords

Morphology; Nanocomposite; Zirconium nitride

Indexed keywords

MICROSTRUCTURE; MORPHOLOGY; NANOCOMPOSITES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

NANOCOMPOSITE THIN FILMS; REACTIVE MAGNETRON SPUTTERING; ZIRCONIUM NITRIDE;

MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; NANOCOMPOSITES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

EID: 38949112124     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.09.003     Document Type: Article

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