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Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 906-910

Structural and electrical properties of sputtered titanium boronitride films

(4) Pierson, J F a Bertran, F b Bauer, J P a Jolly, J c

a UNIVERSITÉ DE FRANCHE COMTÉ (France)

b INSTITUT JEAN LAMOUR (France)

c ECOLE POLYTECHNIQUE (France)

Author keywords

Photoelectron spectroscopy; Reactive sputtering; Resistivity; Ti B N nanocomposite

Indexed keywords

EMISSION SPECTROSCOPY; FILMS; GLASS; STEEL; TITANIUM;

ELECTRICAL RESISTIVITY;

COATING TECHNIQUES;

COATING; FILM; HARDNESS; MICROSTRUCTURE; RESISTIVITY; WEAR RESISTANCE;

EID: 0035386118 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01124-0 Document Type: Article

Times cited : (27)

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