SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 3, 2007, Pages 173-178

Optical and electrical properties of sputtered Zr-Si-N thin films: From solid solution to nanocomposite

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; NANOCOMPOSITES; OPTICAL PROPERTIES; PARTIAL PRESSURE; THIN FILMS; TRANSPORT PROPERTIES;

DIELECTRIC FUNCTIONS; DRUDE DAMPING FACTOR; THEORETICAL FITTING;

ZIRCONIUM COMPOUNDS;

EID: 38549109686 PISSN: 16065131 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (23)

References (16)

1
- 0040610698
- M. Diserens, J. Patscheider and F. Lévy // Surf. Coat. Technol. 108-109 (1998) 241.
- (1998) Surf. Coat. Technol , vol.108-109 , pp. 241
- Diserens, M.¹ Patscheider, J.² Lévy, F.³

2
- 0033438070
- S. Veprek // J. Vac. Sci. Technol. A 17 (1999) 2401.
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 2401
- Veprek, S.¹

3
- 0034092121
- J. Musil // Surf. Coat. Technol. 125 (2000) 322.
- (2000) Surf. Coat. Technol , vol.125 , pp. 322
- Musil, J.¹

4
- 14644390285
- M. Benkahoul, C.S. Sandu, N. Tabet, M. Parlinska-Wojtan, A. Karimi and F. Lévy // Surf. Coat. Technol. 188-189 (2004) 435.
- (2004) Surf. Coat. Technol , vol.188-189 , pp. 435
- Benkahoul, M.¹ Sandu, C.S.² Tabet, N.³ Parlinska-Wojtan, M.⁴ Karimi, A.⁵ Lévy, F.⁶

5
- 1842715003
- D. Pilloud, J. F. Pierson, A. P. Marques and A. Cavaleiro // Surf. Coat. Technol. 180-181 (2004) 352.
- (2004) Surf. Coat. Technol , vol.180-181 , pp. 352
- Pilloud, D.¹ Pierson, J.F.² Marques, A.P.³ Cavaleiro, A.⁴

6
- 14644389406
- J. H. Park, W. S. Chung. Y-R. Cho and K. H. Kim // Surf. Coat. Technol. 188-189 (2004) 425.
- (2004) Surf. Coat. Technol , vol.188-189 , pp. 425
- Park, J.H.¹ Chung, W.S.² Cho, Y.-R.³ Kim, K.H.⁴

7
- 0036565398
- M. Nose, W.A. Chiou, M. Zhou, T. Mae and M. Meshii // J. Vac. Sci. Technol. A 20 (2002) 823.
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 823
- Nose, M.¹ Chiou, W.A.² Zhou, M.³ Mae, T.⁴ Meshii, M.⁵

8
- 33751019146
- doi:10.1016/j.surfcoat.2006.06.003
- C.S. Sandu, M. Benkahoul, R. Sanjinés and F. Lévy // Surf. Coat. Technol. (2006) doi:10.1016/j.surfcoat.2006.06.003.
- (2006) Surf. Coat. Technol
- Sandu, C.S.¹ Benkahoul, M.² Sanjinés, R.³ Lévy, F.⁴

9
- 29744433800
- R. Sanjinés, M. Benkahoul, C.S. Sandu and F. Lévy // J. Appl. Phys. 98 (2005) 123511.
- (2005) J. Appl. Phys , vol.98 , pp. 123511
- Sanjinés, R.¹ Benkahoul, M.² Sandu, C.S.³ Lévy, F.⁴

10
- 33751200961
- C.S. Sandu et al. // Surface & Coatings Technology (2006) doi:10.1016/j.surfcoat.2006.08.002.
- C.S. Sandu et al. // Surface & Coatings Technology (2006) doi:10.1016/j.surfcoat.2006.08.002.

11
- 33751247634
- C.S. Sandu et al. // Surface & Coatings Technology (2006) doi: 10.1016/j.surfcoat.2006.08.100.
- C.S. Sandu et al. // Surface & Coatings Technology (2006) doi: 10.1016/j.surfcoat.2006.08.100.

12
- 0042947648
- A. Nigro, G. Nobile, M.G. Rubino and R. Vaglio II Phys. Rev. B 37 (1988) 3970.
- (1988) Phys. Rev. B , vol.37 , pp. 3970
- Nigro, A.¹ Nobile, G.² Rubino, M.G.³ Vaglio II, R.⁴

13
- 0000239614
- G. Reiss, J. Vancea and H. Hoffman // Phys. Rev. Lett. 56 (1986) 2100.
- (1986) Phys. Rev. Lett , vol.56 , pp. 2100
- Reiss, G.¹ Vancea, J.² Hoffman, H.³

14
- 1342344870
- R. Lamni, E. Martinez, S.G. Springer, R. Sanjinés, RE. Schmid and F. Lévy // Thin Solid Films 447-448 (2004) 316.
- (2004) Thin Solid Films , vol.447-448 , pp. 316
- Lamni, R.¹ Martinez, E.² Springer, S.G.³ Sanjinés, R.⁴ Schmid, R.E.⁵ Lévy, F.⁶

15
- 0001635625
- M. Kaveh and N.F. Mott // J. Phys. C: Solid State Phys. 15 (1982) 707.
- (1982) J. Phys. C: Solid State Phys , vol.15 , pp. 707
- Kaveh, M.¹ Mott, N.F.²

16
- 0041444553
- J-H Tyan and T. Lue // J. Appl. Phys. 75 (1994) 325.
- (1994) J. Appl. Phys , vol.75 , pp. 325
- Tyan, J.-H.¹ Lue, T.²

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