SCOPUS 정보 검색 플랫폼

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 351-357

Characterization of hard DC-sputtered Si-based TiN coatings: The effect of composition and ion bombardment

(10) Ribeiro, E a Rebouta, L a Carvalho, S a Vaz, F a Fuentes, G G b Rodriguez, R b Zazpe, M b Alves, E c Goudeau, Ph d Riviere J P d

a UNIVERSITY OF MINHO (Portugal)

b Asociacion de la Industria Navarra (Spain)

c INSTITUTO TECNOLÓGICO E NUCLEAR (Portugal)

d UNIVERSITÉ DE POITIERS (France)

Author keywords

DC; Ion bombardment; TiN

Indexed keywords

CHARACTERIZATION; COMPOSITION; COMPRESSIVE STRESS; FILM GROWTH; HARDNESS; ION BOMBARDMENT; LATTICE CONSTANTS; NANOSTRUCTURED MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SOLENOIDS; SPUTTERING; TITANIUM NITRIDE;

BIAS VOLTAGE; COATING HARDNESS; HARD COATINGS; NANOCOMPOSITE COATINGS;

COATINGS;

COATING;

EID: 20044390924 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.020 Document Type: Article

Times cited : (40)

References (48)

1
- 0020779486
- J.-E. Sundgren B.-O. Johansson S.E. Karlasson H.T.G. Hentzell Thin Solid Films 105 1983 367
- (1983) Thin Solid Films , vol.105 , pp. 367
- Sundgren, J.-E.¹ Johansson, B.-O.² Karlasson, S.E.³ Hentzell, H.T.G.⁴

2
- 0026120732
- J. Echigoya Z.T. Liu A. Imamura S. Takatsu Thin Solid Films 198 1991 293
- (1991) Thin Solid Films , vol.198 , pp. 293
- Echigoya, J.¹ Liu, Z.T.² Imamura, A.³ Takatsu, S.⁴

3
- 0019536911
- J.A. Mumtaz W.H. Class J. Vac. Sci. Technol. 20 3 1982 345
- (1982) J. Vac. Sci. Technol. , vol.20 , Issue.3 , pp. 345
- Mumtaz, J.A.¹ Class, W.H.²

4
- 0033328889
- M. Nose T. Nagae M. Yokota S. Saji M. Zhou M. Nakada Surf. Coat. Technol. 116-119 1999 296
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 296
- Nose, M.¹ Nagae, T.² Yokota, M.³ Saji, S.⁴ Zhou, M.⁵ Nakada, M.⁶

5
- 0022664083
- S. Kanamori Thin Solid Films 136 1986 195
- (1986) Thin Solid Films , vol.136 , pp. 195
- Kanamori, S.¹

6
- 0034531557
- H.A. Jehn Surf. Coat. Technol. 131 2000 433
- (2000) Surf. Coat. Technol. , vol.131 , pp. 433
- Jehn, H.A.¹

7
- 0001487924
- X. Sun J.S. Reid E. Kolawa M.-A. Nicolet R.P. Ruiz J. Appl. Phys. 81 1997 664
- (1997) J. Appl. Phys. , vol.81 , pp. 664
- Sun, X.¹ Reid, J.S.² Kolawa, E.³ Nicolet, M.-A.⁴ Ruiz, R.P.⁵

8
- 0029407730
- S. Veprek S. Reiprich Thin Solid Films 268 1995 64
- (1995) Thin Solid Films , vol.268 , pp. 64
- Veprek, S.¹ Reiprich, S.²

9
- 0032046770
- S. Veprek Thin Solid Films 317 1998 449
- (1998) Thin Solid Films , vol.317 , pp. 449
- Veprek, S.¹

10
- 0034310611
- S. Veprek A. Niederhofer K. Moto et al. Surf. Coat. Technol. 133-134 2000 152
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 152
- Veprek, S.¹ Niederhofer, A.² Moto, K.³

11
- 0033503577
- M. Diserens J. Patscheider F. Levy Surf. Coat. Technol. 120-121 1999 158
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 158
- Diserens, M.¹ Patscheider, J.² Levy, F.³

12
- 0038832585
- F. Vaz L. Rebouta S. Ramos M.F. da Silva J.C. Soares Surf. Coat. Technol. 108-109 1998 236
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 236
- Vaz, F.¹ Rebouta, L.² Ramos, S.³ da Silva, M.F.⁴ Soares, J.C.⁵

13
- 0034499661
- F. Vaz L. Rebouta P. Goudeau et al. Surf. Coat. Technol. 133-134 2000 307
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 307
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³

14
- 0034310535
- L. Rebouta C.J. Tavares R. Aimo et al. Surf. Coat. Technol. 133-134 2000 234
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 234
- Rebouta, L.¹ Tavares, C.J.² Aimo, R.³

15
- 0036146472
- F. Vaz L. Rebouta P. Goudeau et al. Thin Solid Films 402 2002 195
- (2002) Thin Solid Films , vol.402 , pp. 195
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³

16
- 36449001310
- S. Veprek S. Reiprich L. Shizhi Appl. Phys. Lett. 66 1995 2640
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2640
- Veprek, S.¹ Reiprich, S.² Shizhi, L.³

17
- 0030483837
- S. Veprek M. Haussmann S. Reiprich Li. Shizhi J. Dian Surf. Coat. Technol. 86-87 1996 394
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 394
- Veprek, S.¹ Haussmann, M.² Reiprich, S.³ Shizhi, L.⁴ Dian, J.⁵

18
- 0036806725
- W.J. Meng X.D. Zhang B. Shi R.C. Tittsworth L.E. Rehn P.M. Baldo J. Mater. Res. 17 2002 2628
- (2002) J. Mater. Res. , vol.17 , pp. 2628
- Meng, W.J.¹ Zhang, X.D.² Shi, B.³ Tittsworth, R.C.⁴ Rehn, L.E.⁵ Baldo, P.M.⁶

19
- 0036565398
- M. Nose W.A. Chiou M. Zhou T. Mae M. Meshii J. Vac. Sci. Technol., A 20 2002 823
- (2002) J. Vac. Sci. Technol., A , vol.20 , pp. 823
- Nose, M.¹ Chiou, W.A.² Zhou, M.³ Mae, T.⁴ Meshii, M.⁵

20
- 17544391790
- H.-D. Männling D.S. Patil K. Moto M. Jilek S. Veprek Surf. Coat. Technol. 146-147 2001 263
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 263
- Männling, H.-D.¹ Patil, D.S.² Moto, K.³ Jilek, M.⁴ Veprek, S.⁵

21
- 0036864616
- X. Hu Z. Han G. Li M. Gu J. Vac. Sci. Technol., A 20 2002 1921
- (2002) J. Vac. Sci. Technol., A , vol.20 , pp. 1921
- Hu, X.¹ Han, Z.² Li, G.³ Gu, M.⁴

22
- 84971896351
- S.A. Sambasivan W.T. Petuskey J. Mater. Res. 9 1994 2362
- (1994) J. Mater. Res. , vol.9 , pp. 2362
- Sambasivan, S.A.¹ Petuskey, W.T.²

23
- 0036496671
- E. Ribeiro A. Malczyk S. Carvalho et al. Surf. Coat. Technol. 151-152 2002 515
- (2002) Surf. Coat. Technol. , vol.151-152 , pp. 515
- Ribeiro, E.¹ Malczyk, A.² Carvalho, S.³

24
- 0022075813
- L.R. Doolittle Nucl. Instrum. Methods, B 9 1985 344
- (1985) Nucl. Instrum. Methods, B , vol.9 , pp. 344
- Doolittle, L.R.¹

25
- 0025701315
- J. Musil S. Kadlec V. Valvoda R. Kuzel R. Cerny Surf. Coat. Technol. 43-44 1990 259
- (1990) Surf. Coat. Technol. , vol.43-44 , pp. 259
- Musil, J.¹ Kadlec, S.² Valvoda, V.³ Kuzel, R.⁴ Cerny, R.⁵

26
- 0032370409
- P.J. Kelly R.D. Arnell J. Vac. Sci. Technol., A 16 1998 2858
- (1998) J. Vac. Sci. Technol., A , vol.16 , pp. 2858
- Kelly, P.J.¹ Arnell, R.D.²

27
- 0016568873
- J. Mignot Rondot Acta Metall. 23 1975 1321
- (1975) Acta Metall. , vol.23 , pp. 1321
- Mignot, J.¹ Rondot, A.²

28
- 14644401864
- JCPDS, File 38-1420
- JCPDS, File 38-1420.

29
- 0035465603
- F. Vaz L. Rebouta P. Goudeau et al. Surf. Coat. Technol. 146-147 2001 274
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 274
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³

30
- 0001412607
- A.R. Grimmer F. Von Lampe M. Magi Chem. Phys. Lett. 132 1986 549
- (1986) Chem. Phys. Lett. , vol.132 , pp. 549
- Grimmer, A.R.¹ Von Lampe, F.² Magi, M.³

31
- 0032475271
- S. Muthupari M.E. Fleet J. Non-Cryst. Solids 238 1998 259
- (1998) J. Non-Cryst. Solids , vol.238 , pp. 259
- Muthupari, S.¹ Fleet, M.E.²

32
- 0003482733
- Amsterdam: Elsevier
- J.E. Greene S.A. Barnett J.E. Sundgren A. Rockett Ion Beam Assisted Film Growth 1988 Elsevier Amsterdam
- (1988) Ion Beam Assisted Film Growth
- Greene, J.E.¹ Barnett, S.A.² Sundgren, J.E.³ Rockett, A.⁴

33
- 0033504658
- F. Vaz L. Rebouta B. Almeida P. Goudeau et al. Surf. Coat. Technol. 120-121 1999 166
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 166
- Vaz, F.¹ Rebouta, L.² Almeida, B.³ Goudeau, P.⁴

34
- 0029373369
- H. Oettel R. Wiedemann S. Preißler Surf. Coat. Technol. 74-75 1995 273
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 273
- Oettel, H.¹ Wiedemann, R.² Preißler, S.³

35
- 0018334161
- D.W. Hoffman M.R. Gaertner J. Vac. Sci. Technol. 17 1980 425
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 425
- Hoffman, D.W.¹ Gaertner, M.R.²

36
- 0002173308
- (and references therein)
- L. Hultman Vacuum 57 2000 1 (and references therein)
- (2000) Vacuum , vol.57 , pp. 1
- Hultman, L.¹

37
- 5044236541
- S. Veprek Rev. Adv. Mater. Sci. 5 2003 6
- (2003) Rev. Adv. Mater. Sci. , vol.5 , pp. 6
- Veprek, S.¹

38
- 0037011109
- S.H. Kim J.K. Kim K.H. Kim Thin Solid Films 420-421 2002 360
- (2002) Thin Solid Films , vol.420-421 , pp. 360
- Kim, S.H.¹ Kim, J.K.² Kim, K.H.³

39
- 0023843137
- V. Valvoda R. Kuzel R. Cerny J. Musil Thin Solid Films 156 1988 53
- (1988) Thin Solid Films , vol.156 , pp. 53
- Valvoda, V.¹ Kuzel, R.² Cerny, R.³ Musil, J.⁴

40
- 0031345414
- W. Herr E. Broszeit Surf. Coat. Technol. 97 1997 335
- (1997) Surf. Coat. Technol. , vol.97 , pp. 335
- Herr, W.¹ Broszeit, E.²

41
- 0033410133
- R.A. Andrievski A.M. Glezer Phys. Met. Metallogr. 88 1999 45
- (1999) Phys. Met. Metallogr. , vol.88 , pp. 45
- Andrievski, R.A.¹ Glezer, A.M.²

42
- 14644443053
- in press
- J. Prochazka, F. Vaz, S. Veprek et al., in press.
- Prochazka, J.¹ Vaz, F.² Veprek, S.³

43
- 2142806777
- S. Veprek O. Nesladek A. Niederhofer et al. Surf. Coat. Technol. 108-109 1998 138
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 138
- Veprek, S.¹ Nesladek, O.² Niederhofer, A.³

44
- 0034310610
- P. Holubar M. Jilek M. Sima Surf. Coat. Technol. 133-134 2000 145
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 145
- Holubar, P.¹ Jilek, M.² Sima, M.³

45
- 0035507008
- S. Carvalho L. Rebouta A. Cavaleiro et al. Thin Solid Films 398-399 2001 391
- (2001) Thin Solid Films , vol.398-399 , pp. 391
- Carvalho, S.¹ Rebouta, L.² Cavaleiro, A.³

46
- 0034092121
- J. Musil Surf. Coat. Technol. 125 2000 322
- (2000) Surf. Coat. Technol. , vol.125 , pp. 322
- Musil, J.¹

47
- 4243705538
- P. Karvankova H. Männling Ch. Eggs S. Veprek Surf. Coat. Technol. 146-147 2001 146
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 146
- Karvankova, P.¹ Männling, H.² Eggs, Ch.³ Veprek, S.⁴

48
- 0019536814
- J.J. Cuomo J.M.E. Harper C.R. Guarnieri et al. J. Vac. Sci. Technol. 20 1982 349
- (1982) J. Vac. Sci. Technol. , vol.20 , pp. 349
- Cuomo, J.J.¹ Harper, J.M.E.² Guarnieri, C.R.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.