Model for the evolution of Nb-Si-N thin films as a function of Si content relating the nanostructure to electrical and mechanical properties

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2897-2903

  Sandu, C S ^a   Benkahoul, M ^a   Sanjines R ^a   Levy F ^a  

^a EPFL   (Switzerland)

Author keywords

Morphology; Nanocomposite; Resistivity; Ternary nitride

Indexed keywords

ELECTRIC PROPERTIES; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SPUTTER DEPOSITION; STRESSES; TERNARY SYSTEMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

NANOCRYSTALLITES; SUBSTRATE TEMPERATURE;

NIOBIUM ALLOYS;

ELECTRIC PROPERTIES; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NIOBIUM ALLOYS; SPUTTER DEPOSITION; STRESSES; TERNARY SYSTEMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 33751019146     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.06.003     Document Type: Article

References (21)

1. Diserens M., Patscheider J., and Lévy F. Surf. Coat. Technol. 108-109 (1998) 241
2. Veprek S. J. Vac. Sci. Technol., A 17 (1999) 2401
3. Musil J. Surf. Coat. Technol. 125 (2000) 322
4. Espinoza-Beltrán F.J., Che-Soberanis O., García-González L., and Morales-Hernández J. Thin Solid Films 437 1-2 (2003) 170
5. Pilloud D., Pierson J.F., Marques A.P., and Cavaleiro A. Surf. Coat. Technol. 180-181 (2004) 352
6. Mae T., Nose M., Zhou M., Nagae T., and Shimamura K. Surf. Coat. Technol. 142-144 (2001) 954
7. Musil J., Karvánková P., and Kasl J. Surf. Coat. Technol. 139 (2001) 101
8. Musil J., Zeman P., Hrubý H., and Mayrhofer P.H. Surf. Coat. Technol. 120-121 (1999) 179
9. Benkahoul M., Sandu C.S., Tabet N., Parlinska-Wojtan M., Karimi A., and Lévy F. Surf. Coat. Technol. 188-189 (2004) 435
10. Vaz F., Rebouta L., Almeida B., Goudeau P., Pacaud J., Rivière J.P., and Bessa e Sousa J. Surf. Coat. Technol. 120-121 (1999) 166
11. Martinez E., Sanjińes R., Banakh O., and Lévy F. Thin Solid Films 447-448 (2004) 332
12. Nose M., and Chiou W.A. J. Vac. Sci. Technol., A 20 3 (2002) 823
13. Vaz F., Rebouta L., Goudeau P., Garem H., Pacaud J., Rivière J.P., Cavaleiro A., and Alves E. Surf. Coat. Technol. 133-134 (2000) 307
14. Jedrzejowski P., Baloukas B., Klemberg-Sapieha J.E., and Martinu L. J. Vac. Sci. Technol. A22 3 (2004) 725
15. Denker S.P. J. Less-Common Met. 14 (1968) 1
16. Park J.H., Chung W.S., Cho Y.-R., and Kim K.H. Surf. Coat. Technol. 188-189 (2004) 425
17. Patscheider J., Zehnder T., and Diserens M. Surf. Coat. Technol. 146-147 (2001) 201
18. Sandu C.S., Sanjinés R., Benkahoul M., Parlinska-Wojtan M., Karimi A., and Lévy F. Thin Solid Films 496 2 (2006) 336
19. Jedrzejowski P., Klemberg-Sapieha J.E., and Martinu L. Thin Solid Films 426 (2003) 150
20. Sanjinés R., Benkahoul M., Sandu C.S., Schmid P.E., and Lévy F. J. Appl. Phys. 98 (2005) 123511
21. Veprek S., Veprek-Heijman M.G.J., Karvankova P., and Prochazka J. Thin Solid Films 476 (2005) 1