Optical characteristics and color of TiN/SiN1.3 nanocomposite coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 725-733

  Jedrzejowski, P ^a   Baloukas, B ^a   Klemberg Sapieha, J E ^a   Martinu, L ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COLOR; ELLIPSOMETRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SPECTROPHOTOMETERS; STRUCTURE (COMPOSITION); SUBSTRATES; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; WETTING; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS MIXTURES; MECHANICAL STRESSES; NONCONTACT OPTICAL CHARACTERIZATION; OPTICAL RESPONSES;

NANOSTRUCTURED MATERIALS;

EID: 3142663396     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1723252     Document Type: Article

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