Collisional effects on the radio-frequency sheath dynamics

Journal of Applied Physics

Volumn 90, Issue 12, 2001, Pages 5884-5888

  Qiu, Hua Tan ^a   Wang, You Nian ^a   Ma, Teng Cai ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035894061     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1419267     Document Type: Article

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