Non-neutral/quasi-neutral plasma edge definition for discharge models: A numerical example for dual frequency hydrogen capacitively coupled plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 A, 2006, Pages 5203-5206

  Salabaş, Aurel ^a   Brinkmann, Ralf Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Capacitively coupled plasma; CCP; Dual frequency plasmas; Plasma sheath

Indexed keywords

CAPACITORS; ELECTRIC DISCHARGES; HYDROGEN; PLASMA SIMULATION; VELOCITY MODULATION TUBES;

CAPACITIVELY COUPLED PLASMA; CCP; DUAL FREQUENCY PLASMAS; PLASMA SHEATH;

PLASMAS;

EID: 33745268868     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5203     Document Type: Article

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