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Volumn 91, Issue 9, 2002, Pages 5604-5613
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Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current
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Author keywords
[No Author keywords available]
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Indexed keywords
BULK PLASMA;
CAPACITIVE DISCHARGES;
CAPACITIVELY COUPLED PLASMAS;
COLLISIONLESS;
EVEN-HARMONIC;
FINITE NUMBER;
HARMONIC COMPONENTS;
ION MOTIONS;
NON-SINUSOIDAL;
NONSYMMETRIC;
PLASMA CHAMBERS;
PLASMA IMPEDANCE;
PLASMA MODELING;
RADIO FREQUENCIES;
RADIO FREQUENCY (RF) CURRENTS;
RF VOLTAGE;
SHEATH DYNAMICS;
SHEATH PARAMETERS;
THEORETICAL MODELS;
UNIFORM CURRENT DENSITY;
GROUNDING ELECTRODES;
HARMONIC ANALYSIS;
PLASMAS;
RADIO WAVES;
ELECTRIC DISCHARGES;
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EID: 0036572607
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1462425 Document Type: Article |
Times cited : (11)
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References (27)
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