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Volumn 91, Issue 9, 2002, Pages 5604-5613

Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current

Author keywords

[No Author keywords available]

Indexed keywords

BULK PLASMA; CAPACITIVE DISCHARGES; CAPACITIVELY COUPLED PLASMAS; COLLISIONLESS; EVEN-HARMONIC; FINITE NUMBER; HARMONIC COMPONENTS; ION MOTIONS; NON-SINUSOIDAL; NONSYMMETRIC; PLASMA CHAMBERS; PLASMA IMPEDANCE; PLASMA MODELING; RADIO FREQUENCIES; RADIO FREQUENCY (RF) CURRENTS; RF VOLTAGE; SHEATH DYNAMICS; SHEATH PARAMETERS; THEORETICAL MODELS; UNIFORM CURRENT DENSITY;

EID: 0036572607     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1462425     Document Type: Article
Times cited : (11)

References (27)
  • 14
    • 36449001816 scopus 로고
    • apl APPLAB 0003-6951
    • K. Börnig, Appl. Phys. Lett. 60, 1553 (1992). apl APPLAB 0003-6951
    • (1992) Appl. Phys. Lett. , vol.60 , pp. 1553
    • Börnig, K.1
  • 25
    • 84861438389 scopus 로고    scopus 로고
    • Internet Scientific Systems Ltd., Dublin, Ireland
    • Internet: http://www.scisys.com (Scientific Systems Ltd., Dublin, Ireland, 2000).
    • (2000)
  • 26
    • 0011742006 scopus 로고    scopus 로고
    • Scientific Systems Ltd. Scientific Systems Ltd., Dublin, Ireland
    • Scientific Systems Ltd., Smart PIM™ installation and software manual (Scientific Systems Ltd., Dublin, Ireland, 1997).
    • (1997) Smart PIM™ Installation and Software Manual


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.