Collisional sheath dynamics in the intermediate radio-frequency regime

Journal of Applied Physics

Volumn 95, Issue 3, 2004, Pages 860-869

  Xiang, N ^a   Waelbroeck, F L ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CARRIER CONCENTRATION; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; FREQUENCIES; IONS; MATHEMATICAL MODELS; ORDINARY DIFFERENTIAL EQUATIONS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; POISSON EQUATION; VELOCITY;

COLLISIONAL SHEATH DYNAMICS; FLUID EQUATIONS; ION DENSITY; ION ENERGY DISTRIBUTION; ION MOMENTUM EQUATION; ION PLASMA FREQUENCY; RADIO FREQUENCY;

PLASMA SHEATHS;

EID: 1142292411     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1640458     Document Type: Article

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