Investigation of interface properties of sputter deposited TiN/CrN superlattices by low angle x-ray reflectivity

Journal of Physics D: Applied Physics

Volumn 41, Issue 20, 2008, Pages

  Barshilia, Harish C ^a   Selvakumar, N ^a   Rajam, K S ^a   Gopinadhan, K ^b   Chaudhary, Sujeet ^b  

^a SURFACE ENGINEERING DIVISION   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; FRICTION; MAGNETRON SPUTTERING; MODULATION; MULTILAYERS; REFLECTION; SILICON; SURFACE PROPERTIES; SURFACE ROUGHNESS; X RAY DIFFRACTION;

AS INTERFACES; BRAGG REFLECTIONS; BRAGG'S LAWS; CRITICAL ANGLES; CRITICAL PARAMETERS; DIRECT CURRENT MAGNETRON SPUTTERING; ELECTRON DENSITIES; INTER-LAYERS; INTERFACE PROPERTIES; LAYER MODELS; LAYER THICKNESSES; MODULATION WAVELENGTHS; MULTILAYER COATINGS; NANOLAYERED MULTILAYERS; SHARP INTERFACES; SUBSTRATE BIAS VOLTAGES; SUBSTRATE BIASES; SUBSTRATE INTERFACES; SUBSTRATE TEMPERATURES; SUPERLATTICE COATINGS; SURFACE AND INTERFACES; X-RAY REFLECTIVITIES;

SUBSTRATES;

EID: 56349154141     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/20/205409     Document Type: Article

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