Thermal stability of nitride thin films

Vacuum

Volumn 57, Issue 1, 2000, Pages 1-30

  Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002173308     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00143-3     Document Type: Review

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