Investigation of bilayer period and individual layer thickness of CrN/TiN superlattices by ellipsometry and X-ray techniques

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6176-6180

  Logothetidis, S ^a   Kalfagiannis, N ^a   Sarakinos, K ^a   Patsalas, P ^a,b  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

^b UNIVERSITY OF IOANNINA   (Greece)

Author keywords

Magnetron sputtering; Spectroscopic Ellipsometry; TiN CrN superlattice coatings

Indexed keywords

CHROMIUM COMPOUNDS; DEPOSITION; DIFFRACTION; MAGNETRON SPUTTERING; SUBSTRATES; SUPERLATTICES; TITANIUM NITRIDE; X RAY DIFFRACTION;

BRUGGEMAN EFFECTIVE MEDIUM APPROXIMATION; HIGH DIFFRACTION ANGLES; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATE ROTATION SPEED; SUPERLATTICE COATINGS;

COATINGS;

CHROMIUM COMPOUNDS; COATINGS; DEPOSITION; DIFFRACTION; MAGNETRON SPUTTERING; SUBSTRATES; SUPERLATTICES; TITANIUM NITRIDE; X RAY DIFFRACTION;

EID: 33646142767     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.022     Document Type: Article

References (15)

1. Gwang Kim S., Sang Lee Y., Jun Hahn H., and Sang Lee Y. Surf. Coat. Technol. 171 (2003) 91
2. Hovsepian P.Eh., and Munz W.-D. Vacuum 69 (2003) 27
3. Yashar P., Barnett S.A., Rechner J., and Sproul W.D. J. Vac. Sci. Technol., A 16 (1998) 2913
4. Zeng X.T., Zhang S., Sun C.Q., and Liu Y.C. Thin Solid Films 424 (2003) 99
5. Yashar P.C., and Sproul W.D. Vacuum 55 (1999) 179
6. K. Sarakinos, MSc Thesis, Aristotle University of Thessaloniki (2004).
7. Logothetidis S., Patsalas P., Sarakinos K., Charitidis C., and Metaxa C. Surf. Coat. Technol. 180-181 (2004) 637
8. Bruggeman D.A.G. Ann. Phys. 24 (1935) 636
9. N. Frangis, D. Papapetros, I. Tsiaousis, S. Logothetidis, Surf. Coat. Technol. (in press).
10. Kechagias V.G., Gioti M., Logothetidis S., Benferhat R., and Teer D. Thin Solid Films 364 (2000) 213
11. Bauer G., and Richter W. Optical Characterization of Epitaxial Semiconductor Layers (1996), Springer-Verlag, Berlin-Heidelberg
12. JCPDS File No 79-0613.
13. JCPDS File No. 76-2494.
14. Patsalas P., Gravalidis C., and Logothetidis S. J. Appl. Phys. 96 (2004) 6234
15. Lai F.D., and Wang L.A. Microelectron. Eng. 57-58 (2001) 439