Oscillating growth of surface roughness in multilayer films

Applied Physics Letters

Volumn 84, Issue 25, 2004, Pages 5121-5123

  Liu, Z J ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CORRELATION METHODS; EPITAXIAL GROWTH; FILM GROWTH; INTERFACES (MATERIALS); MATHEMATICAL MODELS; OSCILLATIONS; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

CRYSTALLINE FILMS; INTERFACE ROUGHNESS; MULTILAYER FILMS; PARTICLE DEFLECTION;

MULTILAYERS;

EID: 3142742329     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1764598     Document Type: Article

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