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Volumn 200, Issue 14-15, 2006, Pages 4586-4593

Characterization of low temperature deposited nanolayered TiN/NbN multilayer coatings by cross-sectional transmission electron microscopy

(3) Barshilia, Harish C a Rajam, K S a Sridhara Rao, D V b

a SURFACE ENGINEERING DIVISION (India)

b DEFENCE METALLURGICAL RESEARCH LABORATORY (India)

Author keywords

Reactive sputtering; Structure and properties; TiN NbN multilayers; XTEM, HRTEM

Indexed keywords

CHARACTERIZATION; CRYSTAL GROWTH; HARDNESS; LOW TEMPERATURE EFFECTS; MULTILAYERS; NANOSTRUCTURED MATERIALS; NIOBIUM COMPOUNDS; SILICON; SPUTTER DEPOSITION; STEEL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; MULTILAYER COATINGS; REACTIVE SPUTTERING;

PROTECTIVE COATINGS;

CHARACTERIZATION; CRYSTAL GROWTH; HARDNESS; LOW TEMPERATURE EFFECTS; MULTILAYERS; NANOSTRUCTURED MATERIALS; NIOBIUM COMPOUNDS; PROTECTIVE COATINGS; SILICON; SPUTTER DEPOSITION; STEEL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

EID: 33644691851 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.04.016 Document Type: Article

Times cited : (31)

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