Mechanical and thermal stability of TiN/NbN superlattice thin films

Surface and Coatings Technology

Volumn 133-134, Issue , 2000, Pages 227-233

  Hultman, L ^a   Engstrom C ^b   Oden M ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b VOLVO AERO CORPORATION   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; MAGNETRON SPUTTERING; METALLIC FILMS; NIOBIUM COMPOUNDS; SINGLE CRYSTALS; THERMODYNAMIC STABILITY; TITANIUM NITRIDE;

NIOBIUM NITRIDE;

SUPERLATTICES;

FILM; SPUTTERING; THERMAL ANALYSIS; TITANIUM NITRIDE; WEAR PREVENTION;

EID: 0034310617     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00935-X     Document Type: Article

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