Roughness improvement and hardness enhancement in nanoscale Al/AlN multilayered thin films

Applied Physics Letters

Volumn 71, Issue 14, 1997, Pages 1951-1953

  Wang, X ^a   Kolitsch, A ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000259756     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119752     Document Type: Article

References (19)

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