High-temperature oxidation of TiN/CrN multilayers reactively sputtered at low temperatures

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1497-1502

  Panjan, P ^a   Navinsek B ^a   Cvelbar, A ^a   Zalar, A ^b   Vlcek, J ^c  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

^c UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Low temperature; Multilayers; Oxidation resistance; PVD coatings; Sputtering

Indexed keywords

EID: 0039636078     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00395-2     Document Type: Article

References (11)

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