SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Materials Science Forum

Volumn 457-460, Issue II, 2004, Pages 1263-1268

The SiC-SiO2 interface: A unique advantage of SiC as a wide energy-gap material

(1) Dimitrijev, S a

a GRIFFITH UNIVERSITY (Australia)

Author keywords

Gate oxide; Generation rate; Interface defects; MOS capacitors; MOSFETs; Nitridation; Nonvolatile memory; Surface generation

Indexed keywords

DIELECTRIC DEVICES; ENERGY GAP; INTERFACES (MATERIALS); MOS CAPACITORS; MOSFET DEVICES; PROBLEM SOLVING;

GATE OXIDE; GENERATION RATE; INTERFACE DEFECTS; NITRIDATION; NONVOLATILE MEMORY; SURFACE GENERATION;

SILICON CARBIDE;

EID: 4444259981 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (5)

References (37)

1
- 4244081114
- V.V. Afanas'ev, A. Stesmans, and C.J. Harris: Mater. Sci. Forum Vol. 264-268 (1998), p. 857
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 857
- Afanas'ev, V.V.¹ Stesmans, A.² Harris, C.J.³

2
- 0038642526
- R. Schoner, P. Friedrichs, D. Peters, and D. Stephani: IEEE Electron. Dev. Lett. Vol. 20 (1999), p. 241
- (1999) IEEE Electron. Dev. Lett. , vol.20 , pp. 241
- Schoner, R.¹ Friedrichs, P.² Peters, D.³ Stephani, D.⁴

3
- 0001441489
- H.F. Li, S. Dimitrijev, H.B. Harrison, and D, Sweatman: Appl. Phys. Lett. Vol. 70 (1997), p. 2028
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2028
- Li, H.F.¹ Dimitrijev, S.² Harrison, H.B.³ Sweatman, D.⁴

4
- 0033351550
- P.T. Lai, J.P. Xu, Y.C. Cheng: IEEE Trans. Electron Dev. Vol. 46 (1999) p. 2311
- (1999) IEEE Trans. Electron Dev. , vol.46 , pp. 2311
- Lai, P.T.¹ Xu, J.P.² Cheng, Y.C.³

5
- 0033729250
- J.P. Xu, P.T. Lai, C.L. Chan, B. Li, Y.C. Cheng, IEEE Electron Dev. Lett. Vol. 21 (2000), p. 298
- (2000) IEEE Electron Dev. Lett. , vol.21 , pp. 298
- Xu, J.P.¹ Lai, P.T.² Chan, C.L.³ Li, B.⁴ Cheng, Y.C.⁵

6
- 0036433804
- L.A. Lipkin, M.K. Das, J.W. Palmour, Mater. Sci. Forum Vol. 389-393 (2002), p. 985
- (2002) Mater. Sci. Forum , vol.389-393 , pp. 985
- Lipkin, L.A.¹ Das, M.K.² Palmour, J.W.³

7
- 0242413307
- F. Ciobanu, G. Pensl, H. Nagasawa, A. Schoner, S. Dimitrijev, K.Y. Cheong, V.V. Afanas'ev, and G. Wagner, Mater. Sci. Forum Vol. 433-436 (2003) p. 551
- (2003) Mater. Sci. Forum , vol.433-436 , pp. 551
- Ciobanu, F.¹ Pensl, G.² Nagasawa, H.³ Schoner, A.⁴ Dimitrijev, S.⁵ Cheong, K.Y.⁶ Afanas'ev, V.V.⁷ Wagner, G.⁸

8
- 0033078987
- P. Tanner, S. Dimitrijev, H.F. Li, D. Sweatman, K.E. Prince, and H.B. Harrison: J. Electron. Mater. Vol. 28 (1999), p. 109
- (1999) J. Electron. Mater. , vol.28 , pp. 109
- Tanner, P.¹ Dimitrijev, S.² Li, H.F.³ Sweatman, D.⁴ Prince, K.E.⁵ Harrison, H.B.⁶

9
- 0000448572
- H.F. Li, S. Dimitrijev, D. Sweatman, H.B. Harrison, P. Tanner, and B. Feil: J. Appl. Phys. Vol. 86 (1999), p. 4316
- (1999) J. Appl. Phys. , vol.86 , pp. 4316
- Li, H.F.¹ Dimitrijev, S.² Sweatman, D.³ Harrison, H.B.⁴ Tanner, P.⁵ Feil, B.⁶

10
- 0035898353
- P. Jamet and S. Dimitrijev: Appl. Phys. Lett. Vol. 79 (2001), p. 323
- (2001) Appl. Phys. Lett. , vol.79 , pp. 323
- Jamet, P.¹ Dimitrijev, S.²

11
- 0033892024
- H.-F. Li, S. Dimitrijev, D. Sweatman, and H.B. Harrison: Microelectron. Reliab. Vol. 40 (2000), p. 283
- (2000) Microelectron. Reliab. , vol.40 , pp. 283
- Li, H.-F.¹ Dimitrijev, S.² Sweatman, D.³ Harrison, H.B.⁴

12
- 0035310635
- G.Y. Chung, C.C. Tin, J.R. Williams, K. McDonald, R.K. Chanana, R.A. Weller, S.T. Pantelides, L.C. Feldman, O.W. Holland, M.K. Das, and J.W. Palmour, IEEE Electron Dev. Lett. Vol. 22 (2001), p. 176
- (2001) IEEE Electron Dev. Lett. , vol.22 , pp. 176
- Chung, G.Y.¹ Tin, C.C.² Williams, J.R.³ McDonald, K.⁴ Chanana, R.K.⁵ Weller, R.A.⁶ Pantelides, S.T.⁷ Feldman, L.C.⁸ Holland, O.W.⁹ Das, M.K.¹⁰ Palmour, J.W.¹¹

13
- 79957959962
- R. Shorner, P. Friedrichs, D. Peters, D. Stephani, S. Dimitrijev, and P. Jamet: Appl. Phys. Lett. Vol. 80 (2002), p. 4253
- (2002) Appl. Phys. Lett. , vol.80 , pp. 4253
- Shorner, R.¹ Friedrichs, P.² Peters, D.³ Stephani, D.⁴ Dimitrijev, S.⁵ Jamet, P.⁶

14
- 8744242088
- M.K. Das, G.Y. Chung, J.R. Williams, N.S. Saks, L.A. Lipkin, and J.W. Palmour: Mater. Sci. Forum Vol. 389-393, p. 973
- Mater. Sci. Forum , vol.389-393 , pp. 973
- Das, M.K.¹ Chung, G.Y.² Williams, J.R.³ Saks, N.S.⁴ Lipkin, L.A.⁵ Palmour, J.W.⁶

15
- 0043028391
- C.-Y. Lu, J.A. Cooper, Jr., T. Tsuji, G. Chung, J.R. Williams, K. McDonald, and L.C. Feldman: IEEE Trans. Electron Dev. Vol. 50 (2003), p. 1582
- (2003) IEEE Trans. Electron Dev. , vol.50 , pp. 1582
- Lu, C.-Y.¹ Cooper Jr., J.A.² Tsuji, T.³ Chung, G.⁴ Williams, J.R.⁵ McDonald, K.⁶ Feldman, L.C.⁷

16
- 0032139445
- H.F. Li, S. Dimitrijev, and H.B. Harrison: IEEE Electron Dev. Lett. Vol. 19 (1998), p. 279
- (1998) IEEE Electron Dev. Lett. , vol.19 , pp. 279
- Li, H.F.¹ Dimitrijev, S.² Harrison, H.B.³

17
- 0035890602
- P. Jamet, S. Dimitrijev, and P. Tanner: J. Appl. Phys. Vol. 90 (2001), p. 5058
- (2001) J. Appl. Phys. , vol.90 , pp. 5058
- Jamet, P.¹ Dimitrijev, S.² Tanner, P.³

18
- 0037904757
- K.Y. Cheong, S. Dimitrijev, J. Han, and H.B. Harrison: J. Appl. Phys. Vol. 93 (2003), p. 5682
- (2003) J. Appl. Phys. , vol.93 , pp. 5682
- Cheong, K.Y.¹ Dimitrijev, S.² Han, J.³ Harrison, H.B.⁴

19
- 79956048036
- S. Dimitrijev, K.Y. Cheong, J. Han, and H.B. Harrison: Appl. Phys. Lett. Vol. 80 (2002), p. 3421
- (2002) Appl. Phys. Lett. , vol.80 , pp. 3421
- Dimitrijev, S.¹ Cheong, K.Y.² Han, J.³ Harrison, H.B.⁴

20
- 0036646339
- K.Y. Cheong and S. Dimitrijev: IEEE Electron Dev. Lett. Vol. 23 (2002), p. 404.
- (2002) IEEE Electron Dev. Lett. , vol.23 , pp. 404
- Cheong, K.Y.¹ Dimitrijev, S.²

21
- 0035126222
- P. Jamet, S. Dimitrijev, and P. Tanner: Mater. Sci. Forum Vol. 353-356 (2001), p. 655
- (2001) Mater. Sci. Forum , vol.353-356 , pp. 655
- Jamet, P.¹ Dimitrijev, S.² Tanner, P.³

22
- 0037468012
- 20003
- V.V. Afanas'ev, A. Stesmans, F. Ciobanu, G. Pensl, K.Y. Cheong, and S. Dimitrijev: Appl. Phys. Lett. Vol. 82 (20003), p. 568
- Appl. Phys. Lett. , vol.82 , pp. 568
- Afanas'ev, V.V.¹ Stesmans, A.² Ciobanu, F.³ Pensl, G.⁴ Cheong, K.Y.⁵ Dimitrijev, S.⁶

23
- 0036496492
- S. Chakraborty, P.T. Lai, P.C.K. Kwok: Microelectron. Reliab. Vol. 42 (2002), p. 455
- (2002) Microelectron. Reliab. , vol.42 , pp. 455
- Chakraborty, S.¹ Lai, P.T.² Kwok, P.C.K.³

24
- 0041427869
- K.Y. Cheong, S. Dimitrijev, and J. Han: Mater. Sci. Forum Vol. 433-436 (2003), p. 583.
- (2003) Mater. Sci. Forum , vol.433-436 , pp. 583
- Cheong, K.Y.¹ Dimitrijev, S.² Han, J.³

25
- 0032644154
- S. Dimitrijev, P. Tanner, and H.B. Harrison: Microelectron. Reliab. Vol. 39 (1999), p. 441
- (1999) Microelectron. Reliab. , vol.39 , pp. 441
- Dimitrijev, S.¹ Tanner, P.² Harrison, H.B.³

26
- 0000810016
- V.V. Afanas'ev, A. Stesmans, M. Bassler, G. Pensl, and M.J. Shulz: Appl. Phys. Lett. Vol. 76 (2000), p. 336
- (2000) Appl. Phys. Lett. , vol.76 , pp. 336
- Afanas'ev, V.V.¹ Stesmans, A.² Bassler, M.³ Pensl, G.⁴ Shulz, M.J.⁵

27
- 79956019975
- N.S. Saks, M.G. Ancona, and R.W. Rondell: Appl. Phys. Lett. Vol. 80 (2002) p. 3219
- (2002) Appl. Phys. Lett. , vol.80 , pp. 3219
- Saks, N.S.¹ Ancona, M.G.² Rondell, R.W.³

28
- 18144442294
- H.O. Olafsson, F. Allerstam, and E.O. Sveinbjornsson: Mater. Sci. Forum Vol. 389 (2002), p. 1005
- (2002) Mater. Sci. Forum , vol.389 , pp. 1005
- Olafsson, H.O.¹ Allerstam, F.² Sveinbjornsson, E.O.³

29
- 0041698414
- K.Y. Cheong, S. Dimitrijev, and J. Han: IEEE Trans. Electron Dev. Vol. 50 (2003), p. 1433
- (2003) IEEE Trans. Electron Dev. , vol.50 , pp. 1433
- Cheong, K.Y.¹ Dimitrijev, S.² Han, J.³

30
- 0000305522
- V.V. Afanas'ev and A. Stesmans: Appl. Phys. Lett. Vol 60 (1996), p. 2252.
- (1996) Appl. Phys. Lett. , vol.60 , pp. 2252
- Afanas'ev, V.V.¹ Stesmans, A.²

31
- 0004071496
- Wiley, New York
- nd ed. (Wiley, New York 1998).
- (1998) nd Ed.
- Schroder, D.K.¹

32
- 0005243925
- P. Neudeck, S. Kang, J. Petit, and M. Tabib-Azar: J. Appl. Phys. Vol. 75 (1994), p. 7949
- (1994) J. Appl. Phys. , vol.75 , pp. 7949
- Neudeck, P.¹ Kang, S.² Petit, J.³ Tabib-Azar, M.⁴

33
- 0041698414
- K.Y. Cheong, S. Dimitrijev, and J. Han: IEEE Trans. Electron Dev. Vol. 50 (2003), p. 1433
- (2003) IEEE Trans. Electron Dev. , vol.50 , pp. 1433
- Cheong, K.Y.¹ Dimitrijev, S.² Han, J.³

34
- 0004259460
- Addison Wesley, Reading, USA
- R.F. Pierret: Advanced Semiconductor Fundamentals, Modular Series on Solid State Devices, vol. VI (Addison Wesley, Reading, US A 1989)
- (1989) Advanced Semiconductor Fundamentals, Modular Series on Solid State Devices , vol.6
- Pierret, R.F.¹

35
- 8744310651
- J.B. Baliga: J. Appl. Phys. Vol. 79 (1982), p. 1759
- (1982) J. Appl. Phys. , vol.79 , pp. 1759
- Baliga, J.B.¹

36
- 8744301994
- US Patent No. 5,465,249
- J.A. Cooper, Jr., J.W. Palmour, and C.H. Carter: US Patent No. 5,465,249 (1991)
- (1991)
- Cooper Jr., J.A.¹ Palmour, J.W.² Carter, C.H.³

37
- 1842722885
- H. Nagasawa, T. Kawahara, and K. Yagi: Mater. Sci. Forum Vol. 389-393 (2002), p. 319.
- (2002) Mater. Sci. Forum , vol.389-393 , pp. 319
- Nagasawa, H.¹ Kawahara, T.² Yagi, K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.