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Volumn 80, Issue 18, 2002, Pages 3421-3423
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Charge retention in metal-oxide-semiconductor capacitors on SiC used as nonvolatile-memory elements
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Author keywords
[No Author keywords available]
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Indexed keywords
CHARGE LEAKAGE;
CHARGE RETENTION;
GATE OXIDE;
GENERATION RATE;
MEMORY ELEMENT;
METAL OXIDE SEMICONDUCTOR;
METAL-OXIDE-SEMICONDUCTOR CAPACITORS;
NITRIDED;
NON-VOLATILE RANDOM-ACCESS MEMORIES;
RETENTION TIME;
ROOM TEMPERATURE;
THEORETICAL LIMITS;
DIELECTRIC DEVICES;
MOS CAPACITORS;
RANDOM ACCESS STORAGE;
SILICON CARBIDE;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 79956048036
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1476060 Document Type: Article |
Times cited : (16)
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References (11)
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