Indications for nitrogen-assisted removal of carbon from SiO2-SiC interface

Materials Science Forum

Volumn 353-356, Issue , 2001, Pages 655-658

  Jamet, P ^a   Dimitrijev, S ^a   Tanner, P ^a  

^a GRIFFITH UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BINDING ENERGY; CARBON; CHEMICAL BONDS; INTERFACES (MATERIALS); NITROGEN; PASSIVATION; REMOVAL; SECONDARY ION MASS SPECTROMETRY; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON REMOVAL; INTERFACIAL BONDS; NITROGEN ASSISTED REMOVAL;

SILICON CARBIDE;

EID: 0035126222     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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