Characterization of aligned wafer-level transfer of thin and flexible parylene membranes

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1386-1396

  Kim, Hanseup ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Encapsulation; Membrane transfer; Microfluidics; Micromachining; Micropumps; Parylene; Wafer level transfer

Indexed keywords

ENCAPSULATION; ETCHING; EVAPORATION; MICROFABRICATION; PHOTOLITHOGRAPHY; THIN FILMS;

MEMBRANE TRANSFER; MICROPUMPS; PARYLENE; WAFER-LEVEL TRANSFER;

MICROFLUIDICS;

EID: 36949001128     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.906759     Document Type: Article

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