A micropump-driven high-speed mems gas chromatography system

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1505-1508

  Kim, Hanseup ^a   Steinecker, William H ^a   Reidy, Shaelah ^a   Lambertus, Gordon R ^a   Astle, Aaron A ^a   Najafi, Khalil ^a   Zellers, Edward T ^a   Bernal, Luis P ^a   Washabaugh, Peter D ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

And VOC separation and detection; Micro chemiresistor sensor; Micro column; Micro gas chromatography ( GC); Micropump; Micropump driven GC; Temperature programming

Indexed keywords

ACTUATORS; ARSENIC COMPOUNDS; CHEMICAL SENSORS; CHLORINE COMPOUNDS; CHROMATOGRAPHIC ANALYSIS; CHROMATOGRAPHY; COLUMN CHROMATOGRAPHY; COLUMNS (STRUCTURAL); GASES; ISOMERS; MICROSYSTEMS; ORGANIC COMPOUNDS; PUMPS; SENSORS; SEPARATION; TRANSDUCERS; VOLATILE ORGANIC COMPOUNDS;

ANALYSIS TIME; AND DETECTION; AND VOC SEPARATION AND DETECTION; CHEMIRESISTOR; GAS ANALYSIS; GAS SEPARATIONS; GC SYSTEM; HIGH SPEEDS; INTERNATIONAL CONFERENCES; MICRO CHEMIRESISTOR SENSOR; MICRO COLUMN; MICRO PUMPING; MICROPUMP; SEPARATION COLUMNS; SOLID-STATE SENSORS; TEMPERATURE PROGRAMMING;

GAS CHROMATOGRAPHY;

EID: 36949037618     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300430     Document Type: Conference Paper

References (9)

1. E. T. Zellers et al., "A versatile MEMS gas chromatograph for determinations of environmental vapor mixtures," Hilton Head '04, pp.61-66.
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3. P. R. Lewis et al., "Recent advancements in the gas-phase MicroChemLab," IEEE Sensors Journal, v6, n3, pp. 784-795, 2006.
4. H. Kim et al., "Integrated high-pressure 4-stage micro gas pump for high speed micro gas chromatography," μTAS '06, pp. 1037-1039.
5. H. Kim et al., "A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves," MEMS '07, pp. 131-4.
6. C.-J. Lu et al., "First-generation hybrid MEMS gas chromatography," LOC, v5, pp. 1123-31, 2005.
7. W. H. Steinecker et al., "Chemiresistor array with nanocluster interfaces as a micro-GC detector," Transducers '03, pp. 1343-1346, 2003.
8. G. L. Lambertus et al., "Design, fabrication, and evaluation of microfabricated columns for GC," Anal. Chem., v76, n9, pp.2629-2637, 2004.
9. S. M. Reidy et al., "High-performance, static-coated silicon microfabricated columns for GC," Anal. Chem., v78, n8, pp.2623-2630, 2006.