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Volumn , Issue , 2006, Pages
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Directional pumping performance of an electrostatic checkerboard microvalve
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROSTATICS;
FLOW OF GASES;
FLOW RATE;
MACHINE DESIGN;
MEMS;
PUMPS;
ELECTROSTATIC CHECKERBOARD MICROVALVES;
MICROVALVE MEMBRANES;
OSCILLATORY MOTION;
VOLUME DISPLACEMENT;
VALVES (MECHANICAL);
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EID: 85196516777
PISSN: 1096665X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1115/IMECE2006-16211 Document Type: Conference Paper |
Times cited : (1)
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References (9)
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