A wireless microsystem for the remote sensing of pressure, temperature, and relative humidity

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 12-22

  DeHennis, Andrew D ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Anodic bonding; Backscatter modulation; Bimorph sensor; Capacitive interface; Electrical feedthrough; Eutectic bonding; Passive telemetry; Relaxation oscillator; Wireless sensor

Indexed keywords

ANTENNAS; ATMOSPHERIC HUMIDITY; ATMOSPHERIC PRESSURE; ATMOSPHERIC TEMPERATURE; CAPACITANCE; DATA TRANSFER; ELECTRIC IMPEDANCE; MICROPROCESSOR CHIPS; MICROSENSORS; RELAXATION OSCILLATORS; REMOTE SENSING; TRANSDUCERS;

ANODIC BONDING; BACKSCATTER MODULATION; BIMORPH SENSOR; CAPACITIVE INTERFACE; ELECTRICAL FEEDTHROUGH; EUTECTIC BONDING; WIRELESS MICROSYSTEM; WIRELESS SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 14044253472     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839650     Document Type: Article

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