Improved valve-less pump fabricated using deep reactive ion etching

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 479-484

  Olsson, Anders ^a   Enoksson, Peter ^a   Stemme, Goran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSERS (FLUID); FABRICATION; GLASS BONDING; MICROMACHINING; REACTIVE ION ETCHING;

ANODIC BONDING; DEEP REACTIVE ION ETCHING; DIFFUSER ELEMENTS; MICROPUMPS; PUMP CHAMBERS; VALVELESS PUMP;

PUMPS;

EID: 0029731989     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)