Parylene micromolding, a rapid and low-cost fabrication method for parylene microchannel

Sensors and Actuators, B: Chemical

Volumn 102, Issue 1, 2004, Pages 78-85

  Noh, Hong Seok ^a   Huang, Yong ^b   Hesketh, Peter J ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b AMRL   (United States)

Author keywords

MEMS; Microchannel; Micromolding; Parylene

Indexed keywords

ELECTRODES; ELECTROPHORESIS; GLASS TRANSITION; PHOTOLITHOGRAPHY; PHOTORESISTS; POTASSIUM COMPOUNDS; STAINLESS STEEL;

MICROCHANNELS; MICROMOLDING; PARYLENE; THERMAL BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 4344595818     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.09.038     Document Type: Article

References (7)

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