A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 131-134

  Kim, Hanseup ^a   Astle, Aaron A ^a   Najafi, Khalil ^a   Bernal, Luis P ^a   Washabaugh, Peter D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Active micro valves; Electrostatic gas micropump; Fluidic resonance; Peristaltic pump

Indexed keywords

COMPOSITE MICROMECHANICS; DIESEL ENGINES; FLOW RATE; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PHOTORESISTS; REACTIVE ION ETCHING; STAGES; VALVES (MECHANICAL);

ACTIVE MICRO VALVES; AIR FLOW RATES; DUAL DRIVES; ELECTROSTATIC GAS MICROPUMP; FLUIDIC RESONANCE; FULLY INTEGRATED; GAS FLOWING; HIGH FLOW; HIGH FREQUENCIES; HIGH PRESSURE; HIGH-EFFICIENCY; INTERNATIONAL CONFERENCES; MAXIMUM PRESSURE; MICRO PUMPING; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-VALVES; MULTI-STAGE; PERISTALTIC PUMP; PUMPING CHAMBERS; TEST RESULTS; TOTAL POWER;

PUMPS;

EID: 36949012828     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. E. Zellers and et.al., "A versatile MEMS gas Chromatograph for determinations of environmental vapor mixtures," 11th Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '04), Hilton Head Island, SC, pp. 61-66, 2004.
2. A. Astle, A. Paige, L. P. Bernal, J. Munfakh, H. Kim, and K. Najafi, "Analysis and design of multistage electrostatically-actuated micro vacuum pumps," ASME International Mechanical Engineering Congress & Exposition (ASME '02), New Orleans, Louisiana, pp. 2002-39308, 2002.
3. H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, "Integrated peristaltic 18-stage electrostatic gas micro pump with active microvalves," Hilton Head 2006, Hilton Head Island, South Carolina, pp. 292-295, 2006.
4. H. S. Kim, K. Najafi, P. D. Washabaugh, and L. P. Bernal, "Large-deflection out-of-plane electrostatic buckled-electrode actuator," The 12th International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers '03), Boston, MA, USA, pp. 794-797, 2003.
5. H. S. Kim and K. Najafi, "Wafer bonding using Parylene and wafer-level transfer of free-standing Parylene membranes," Transducers '03, Boston, MA, USA, pp. 790-793, 2003.
6. H. Kim and K. Najafi, "Characterization of a low-temperature wafer bonding using thin film Parylene," IEEE Journal of Microelectromechanical Systems (JMEMS), vol. 14, no. 6, pp. 1347-1355, 2005.
7. H. Kim, A. Astle, L. Bernal, K. Najafi, and P. Washabaugh, "Directional pumping performance of an electrostatic checkerboard microvalve", ASME '06, Chicago, IL, Nov. 5-10, 2006, IMECE 2006-16211.