On-chip vacuum generated by a micromachined Knudsen pump

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 741-746

  McNamara, Shamus ^a,b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b University of Louisville   (United States)

Author keywords

High temperature; Thermal isolation; Thermal transpiration; Thermomolecular; Vacuum pump

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; SILICON WAFERS; THERMAL EFFECTS; TRANSPIRATION;

KNUDSEN PUMP; THERMAL ISOLATION; THERMAL TRANSPIRATION; THERMOMOLECULAR;

VACUUM PUMPS;

EID: 27144451508     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.850718     Document Type: Article

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