-
1
-
-
0001038893
-
Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys
-
Fischetti M.V., and Laux S.E. Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys. J Appl Phys 80 4 (1996) 2234-2252
-
(1996)
J Appl Phys
, vol.80
, Issue.4
, pp. 2234-2252
-
-
Fischetti, M.V.1
Laux, S.E.2
-
2
-
-
21644452652
-
-
Yang HS, Malik R, Narasimha S, Li Y, Divakaruni R, Agnello P, et al. Dual stress liner for high performance sub-45 nm gate length SOI CMOS manufacturing. In: Electron devices meeting, 2004. IEDM Technical Digest, IEEE International; 2004.
-
-
-
-
3
-
-
0036923437
-
-
Ota K, Sugihara K, Sayama H, Uchida T, Oda H, Eimori T, et al. Novel locally strained channel technique for high performance 55 nm CMOS. In: 2002 IEEE international devices meeting (IEDM), December 8-11 2002. San Francisco, CA, United States: Institute of Electrical and Electronics Engineers Inc.; 2002.
-
-
-
-
4
-
-
8344236776
-
A 90-nm logic technology featuring strained-silicon
-
Thompson S.E., Armstrong M., Auth C., Alavi M., Buehler M., Chau R., et al. A 90-nm logic technology featuring strained-silicon. IEEE Trans Electron Dev 51 11 (2004) 1790-1797
-
(2004)
IEEE Trans Electron Dev
, vol.51
, Issue.11
, pp. 1790-1797
-
-
Thompson, S.E.1
Armstrong, M.2
Auth, C.3
Alavi, M.4
Buehler, M.5
Chau, R.6
-
5
-
-
33847755083
-
-
Ang K-W, Chui K-J, Bliznetsov V, Wang Y, Wong L-Y, Tung C-H, et al. Thin body silicon-on-insulator N-MOSFET with silicon-carbon source/drain regions for performance enhancement. In: Electron devices meeting, 2005. IEDM Technical Digest, IEEE International; 2005.
-
-
-
-
6
-
-
33846276277
-
-
Oishi A, Fujii O, Yokoyama T, Ota K, Sanuki T, Inokuma H, et al. High performance CMOSFET technology for 45 nm generation and scalability of stress-induced mobility enhancement technique. In: Electron devices meeting, 2005. IEDM Technical Digest, IEEE International; 2005.
-
-
-
-
7
-
-
0035715857
-
-
Shimizu A, Hachimine K, Ohki N, Ohta H, Koguchi M, Nonaka Y, et al. Local mechanical-stress control (LMC): a new technique for CMOS-performance enhancement. In: Electron devices meeting, 2001. IEDM Technical Digest, IEEE International; 2001.
-
-
-
-
8
-
-
33744832246
-
-
Eneman G, Jurczak M, Verheyen P, Hoffmann T, De Keersgieter A, De Meyer K. Scalability of strained nitride capping layers for future CMOS generations. In: Solid-state device research conference, 2005. ESSDERC 2005. Proceedings of the 35th European. 2005.
-
-
-
-
10
-
-
0041910808
-
High-performance nMOSFETs using a novel strained Si/SiGe CMOS architecture
-
Olsen S.H., O'Neill A.G., Driscoll L.S., Kwa K.S.K., Chattopadhyay S., Waite A.M., et al. High-performance nMOSFETs using a novel strained Si/SiGe CMOS architecture. IEEE Trans Electron Dev 50 9 (2003) 1961-1969
-
(2003)
IEEE Trans Electron Dev
, vol.50
, Issue.9
, pp. 1961-1969
-
-
Olsen, S.H.1
O'Neill, A.G.2
Driscoll, L.S.3
Kwa, K.S.K.4
Chattopadhyay, S.5
Waite, A.M.6
-
11
-
-
33947248577
-
Thick-strained-Si/relaxed-SiGe structure of high-performance RF power LDMOSFETs for cellular handsets
-
Kondo M., Sugii N., Hoshino Y., Hirasawa W., Kimura Y., Miyamoto M., et al. Thick-strained-Si/relaxed-SiGe structure of high-performance RF power LDMOSFETs for cellular handsets. IEEE Trans Electron Dev 53 12 (2006) 3136-3145
-
(2006)
IEEE Trans Electron Dev
, vol.53
, Issue.12
, pp. 3136-3145
-
-
Kondo, M.1
Sugii, N.2
Hoshino, Y.3
Hirasawa, W.4
Kimura, Y.5
Miyamoto, M.6
-
12
-
-
19944433396
-
Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors
-
Lee M.L., Fitzgerald E.A., Bulsara M.T., Currie M.T., and Lochtefeld A. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors. J Appl Phys 97 1 (2005) 011101-011128
-
(2005)
J Appl Phys
, vol.97
, Issue.1
, pp. 011101-011128
-
-
Lee, M.L.1
Fitzgerald, E.A.2
Bulsara, M.T.3
Currie, M.T.4
Lochtefeld, A.5
-
13
-
-
46049117355
-
-
Mizuno T, Irisawa T, Hirashita N, Moriyama Y, Numata T, Tezuka T, et al. Novel Anisotropic strain engineering on (1 1 0)-surface SOI CMOS devices using combination of local/global strain techniques. In: Electron devices meeting, 2006. IEDM Technical Digest, IEEE International; 2006.
-
-
-
-
14
-
-
36248984089
-
-
Irisawa T, Numata T, Tezuka T, Sugiyama N, Takagi S. Novel anisotropic electron transport properties of ultra-thin-body and tri-gate SOI nMOSFETs with biaxial and uniaxial strain. In: Electron devices meeting, 2006. IEDM Technical Digest, IEEE International; 2006.
-
-
-
-
16
-
-
85006867730
-
-
Su LT, Goodson KE, Antoniadis DA, Flik MI, Chung JE. Measurement and modeling of self-heating effects in SOI nMOSFETs. In: Electron devices meeting, 1992. Technical Digest, International; 1992.
-
-
-
-
17
-
-
30344467214
-
-
Buca D, Feste SF, Hollander B, Mantl S, Loo R, Caymax M. Growth of strained Si on He ion implanted Si/SiGe heterostructures. Solid-state electronics papers selected from the 2005 ULIS conference, vol. 50(1); 2006. p. 32-7.
-
-
-
-
18
-
-
0032318730
-
New virtual substrate concept for vertical MOS transistors
-
Kasper E., Lyutovich K., Bauer M., and Oehme M. New virtual substrate concept for vertical MOS transistors. Thin Solid Film 336 1-2 (1998) 319-322
-
(1998)
Thin Solid Film
, vol.336
, Issue.1-2
, pp. 319-322
-
-
Kasper, E.1
Lyutovich, K.2
Bauer, M.3
Oehme, M.4
-
19
-
-
1142292408
-
Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer
-
[Proceedings of the first international SiGe technology and device meeting (ISTDM 2003) - from materials and process technology to device and circuit technology]
-
Delhougne R., Meunier-Beillard P., Caymax M., Loo R., and Vandervorst W. Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer. Appl Surf Sci 224 1-4 (2004) 91-94 [Proceedings of the first international SiGe technology and device meeting (ISTDM 2003) - from materials and process technology to device and circuit technology]
-
(2004)
Appl Surf Sci
, vol.224
, Issue.1-4
, pp. 91-94
-
-
Delhougne, R.1
Meunier-Beillard, P.2
Caymax, M.3
Loo, R.4
Vandervorst, W.5
-
20
-
-
33244480559
-
Thermal stability of a reverse-graded SiGe buffer layer for growth of relaxed sige epitaxy
-
Wong L.H., Liu J.P., Wong C.C., Ferraris C., White T.J., Chan L., et al. Thermal stability of a reverse-graded SiGe buffer layer for growth of relaxed sige epitaxy. Electrochem. Solid-State Lett. 9 4 (2006) G114-G116
-
(2006)
Electrochem. Solid-State Lett.
, vol.9
, Issue.4
-
-
Wong, L.H.1
Liu, J.P.2
Wong, C.C.3
Ferraris, C.4
White, T.J.5
Chan, L.6
-
21
-
-
0034229205
-
Relaxed SiGe buffers with thicknesses below 0.1 μm
-
Bauer M., Lyutovich K., Oehme M., Kasper E., Herzog H.-J., and Ernst F. Relaxed SiGe buffers with thicknesses below 0.1 μm. Thin Solid Film 369 1-2 (2000) 152-156
-
(2000)
Thin Solid Film
, vol.369
, Issue.1-2
, pp. 152-156
-
-
Bauer, M.1
Lyutovich, K.2
Oehme, M.3
Kasper, E.4
Herzog, H.-J.5
Ernst, F.6
-
22
-
-
3142772953
-
Strained silicon FETs on thin SiGe virtual substrates produced by He implantation: effect of reduced self-heating on DC and RF performance
-
Hackbarth T., Herzog H.-J., Hieber K.-H., Konig U., Mantl S., Hollander B., et al. Strained silicon FETs on thin SiGe virtual substrates produced by He implantation: effect of reduced self-heating on DC and RF performance. Solid-State Electron 48 10-11 SPEC ISS (2004) 1921-1925
-
(2004)
Solid-State Electron
, vol.48
, Issue.10-11 SPEC ISS
, pp. 1921-1925
-
-
Hackbarth, T.1
Herzog, H.-J.2
Hieber, K.-H.3
Konig, U.4
Mantl, S.5
Hollander, B.6
-
23
-
-
33947097365
-
Control of self-heating in thin virtual substrate strained Si MOSFETs
-
Olsen S.H., Escobedo-Cousin E., Varzgar J.B., Agaiby R., Seger J., Dobrosz P., et al. Control of self-heating in thin virtual substrate strained Si MOSFETs. IEEE Trans Electron Dev 53 9 (2006) 2296-2305
-
(2006)
IEEE Trans Electron Dev
, vol.53
, Issue.9
, pp. 2296-2305
-
-
Olsen, S.H.1
Escobedo-Cousin, E.2
Varzgar, J.B.3
Agaiby, R.4
Seger, J.5
Dobrosz, P.6
-
24
-
-
0030379801
-
Self-heating effects in SOI MOSFET's and their measurement by small signal conductance techniques
-
Tenbroek B.M., Lee M.S.L., Redman-White W., Bunyan R.J.T., and Uren M.J. Self-heating effects in SOI MOSFET's and their measurement by small signal conductance techniques. IEEE Trans Electron Dev 43 12 (1996) 2240-2248
-
(1996)
IEEE Trans Electron Dev
, vol.43
, Issue.12
, pp. 2240-2248
-
-
Tenbroek, B.M.1
Lee, M.S.L.2
Redman-White, W.3
Bunyan, R.J.T.4
Uren, M.J.5
-
25
-
-
28344442970
-
Thermal conductivity of epitaxial layers of dilute SiGe alloys
-
Cahill D.G., Watanabe F., Rockett A., and Vining C.B. Thermal conductivity of epitaxial layers of dilute SiGe alloys. Phys Rev B (Conden Matter Mater Phys) 71 23 (2005) 235202-235204
-
(2005)
Phys Rev B (Conden Matter Mater Phys)
, vol.71
, Issue.23
, pp. 235202-235204
-
-
Cahill, D.G.1
Watanabe, F.2
Rockett, A.3
Vining, C.B.4
-
26
-
-
0036999662
-
Performance enhancement of strained-Si MOSFETs fabricated on a chemical-mechanical-polished SiGe substrate
-
Sugii N., Hisamoto D., Washio K., Yokoyama N., and Kimura S. Performance enhancement of strained-Si MOSFETs fabricated on a chemical-mechanical-polished SiGe substrate. IEEE Trans Electron Dev 49 12 (2002) 2237-2243
-
(2002)
IEEE Trans Electron Dev
, vol.49
, Issue.12
, pp. 2237-2243
-
-
Sugii, N.1
Hisamoto, D.2
Washio, K.3
Yokoyama, N.4
Kimura, S.5
-
27
-
-
0141761533
-
-
Xiang Q, Goo J-S, Pan J, Yu B, Ahmed S, Zhang J, et al. Strained silicon NMOS with nickel-silicide metal gate. In: Symposium on VLSI technology, 2003. Digest of Technical Papers; 2003.
-
-
-
-
28
-
-
36248938451
-
-
http://public.itrs.net.
-
-
-
-
29
-
-
33847659111
-
Threshold-voltage control of ac performance degradation-free FD SOI MOSFET with extremely thin BOX using variable body-factor scheme
-
Ohtou T., Yokoyama K., Shimizu K., Nagumo T., and Hiramoto T. Threshold-voltage control of ac performance degradation-free FD SOI MOSFET with extremely thin BOX using variable body-factor scheme. IEEE Trans Electron Dev 54 2 (2007) 301-307
-
(2007)
IEEE Trans Electron Dev
, vol.54
, Issue.2
, pp. 301-307
-
-
Ohtou, T.1
Yokoyama, K.2
Shimizu, K.3
Nagumo, T.4
Hiramoto, T.5
-
30
-
-
84886697001
-
-
Hong SH, Nam SM, Yu CG, Jeon SH, Park JT. New experimental findings on the enhanced MOSFET degradation at elevated temperature. In: TENCON 99. Proceedings of the IEEE region 10 conference; 1999.
-
-
-
|