Beyond Β- C3 N4 -Fullerene-like carbon nitride: A promising coating material

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 633-644

  Neidhardt, Jörg ^a,b   Hultman, Lars ^b  

^a UNIVERSITY OF LEOBEN   (Austria)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; ELASTICITY; FULLERENES; GRAPHITIZATION; MATERIALS SCIENCE; ORGANIC COATINGS;

CARBON-BASED BENEFICIAL FRICTION; CURVED STRUCTURAL UNITS; LATTICE SPACING; NONCRYSTALLINE MATERIALS; SOLID FILM MATERIALS;

CARBON NITRIDE;

EID: 34547353413     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2738505     Document Type: Article

References (102)

1. S. Muhl and J. M. Mendez, Diamond Relat. Mater. 8, 1809 (1999).
2. E. C. Franklin, J. Am. Chem. Soc. 47, 486 (1922).
3. L. Pauling and J. H. Sturdivant, Proc. Natl. Acad. Sci. U.S.A. 23, 615 (1937).
4. R. C. DeVries, Mater. Res. Innovations 1, 161 (1997).
5. M. L. Cohen, Phys. Rev. B 32, 7988 (1985).
6. A. Y. Liu and M. L. Cohen, Science 245, 841 (1989).
7. A. Y. Liu and M. L. Cohen, Phys. Rev. B 41, 10727 (1990).
8. A. Y. Liu and R. M. Wentzcovitch, Phys. Rev. B 50, 10362 (1994).
9. D. M. Teter and R. J. Hemley, Science 271, 53 (1996).
10. M. Cote and M. L. Cohen, Phys. Rev. B 55, 5684 (1997).
11. Y. Miyamoto, M. L. Cohen, and S. G. Louie, Solid State Commun. 102, 605 (1997).
12. J. E. Lowther, Phys. Rev. B 57, 5724 (1998).
13. American Metal Market (1992).
14. American Metal Market (1993).
15. Science News (1998).
16. Science News (1999).
17. P. Preuss, Discover 14, 132 (1993).
18. J. J. Cuomo, P. A. Leary, D. Yu, W. Reuter, and M. Frisch, J. Vac. Sci. Technol. 16, 299 (1979).
19. E. G. Wang, Prog. Mater. Sci. 41, 241 (1997).
20. A. Badzian, T. Badzian, W. D. Drawl, and R. Ray, Diamond Relat. Mater. 7, 1519 (1998).
21. S. Matsumoto, E.-Q. Xie, and F. Izumi, Diamond Relat. Mater. 8, 1175 (1999).
22. R. C. DeVries, Diamond Relat. Mater. 4, 1093 (1995).
23. T. Hughbanks and T. Tian, Solid State Commun. 96, 321 (1995).
24. T. Malkow, Mater. Sci. Eng., A 302, 311 (2001).
25. D. M. Teter, MRS Bull. 98, 22 (1998).
26. J. Robertson, Mater. Sci. Eng., R. 37, 129 (2002).
27. B. Kleinsorge, A. C. Ferrari, J. Robertson, W. I. Milne, S. Waidman, and S. Hearn, Diamond Relat. Mater. 9, 643 (2000).
28. N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J.-E. Sundgren, Phys. Rev. B 59, 5162 (1999).
29. J. Neidhardt, L. Hultman, E. Broitman, T. W. Scharf, and I. L. Singer, Diamond Relat. Mater. 13, 1882 (2004).
30. H. Sjöström, S. Stafström, M. Boman, and J.-E. Sundgren, Phys. Rev. Lett. 75, 1336 (1995).
31. Z. J. Zhang, S. Fan, J. Huang, and C. M. Lieber, Appl. Phys. Lett. 68, 2639 (1996).
32. C. Running, U. Griesmeier, M. Gross, H. C. Hofsäss, R. Downing, and G. P. Lamaze, Diamond Relat. Mater. 4, 666 (1995).
33. D. R. McKenzie, Y. Yim, N. A. Marks, C. A. Davis, B. A. Pailthorpe, G. Amaratunga, and V. S. Veerasamy, Diamond Relat. Mater. 3, 353 (1994).
34. A. Modinos and J. P. Xanthakis, Appl. Phys. Lett. 73, 1874 (1998).
35. H. Kinoshita and A. Yamauchi, J. Vac. Sci. Technol. A 14, 1933 (1996).
36. I. Huttel, J. Gurovic, F. Cerny, and J. Pospisil, Diamond Relat. Mater. 8, 628 (1999).
37. T. W. Scharf, R. D. Ott, D. Yang, and J. A. Barnard, J. Appl. Phys. 85, 3142 (1999).
38. A. Wienss, M. Neuhauser, H. Schneider, G. Persch-Schuy, J. Windeln, T. Witke, and U. Hartmann, Diamond Relat. Mater. 10, 1024 (2001).
39. D. B. Bogy, W. Fong, B. H. Thornton, Z. Hong, H. M. Gross, and C. S. Bhatia, IEEE Trans. Magn. 38, 1879 (2002).
40. I. A. Garcia, E. G. Berasategui, J. Neidhardt, N. Hellgren, S. J. Bull, and L. Hultman, Philos. Mag. A 82, 2133 (2002).
41. I. Alexandrou, H.-J. Scheibe, H.-J. Kiely, C. J. Papworth, G. A. J. Amaratunga, and B. Schultrich, Phys. Rev. B 60, 10903 (1999).
42. M. Johansson, H. Sjöström, and L. Hultman, Vacuum 53, 451 (1999).
43. D. L. Strout, J. Phys. Chem. A 104, 3364 (2000).
44. M. Chhowalla and G. A. J. Amaratunga, Nature (London) 407, 164 (2000).
45. S. Avivi, Y. Mastai, and A. J. Gedanken, J. Am. Chem. Soc. 122, 4331 (2000).
46. G. Seifert, H. Terrones, M. Terrones, and T. Frauenheim, Solid State Commun. 115, 635 (2000).
47. A. Rothschild, J. Sloan, and R. Tenne, J. Am. Chem. Soc. 122, 5169 (2000).
48. R. Tenne, J. Mater. Res. 21, 2726 (2006).
49. Å. Johansson, Doctoral thesis, Linköping University, 2002.
50. W. W. Porterfield, Inorganic Chemistry-A Unified Approach (Academic, London, 1993).
51. S. Stafström, Appl. Phys. Lett. 77, 3941 (2000).
52. J. Neidhardt, Zs. Czigány, I. F. Brunell, and L. Hultman, J. Appl. Phys. 93, 3002 (2003).
53. E. Broitman, N. Hellgren, J. Neidhardt, I. F. Brunell, and L. Hultman, J. Electron. Mater. 31, 11 (2002).
54. J. Neidhardt, H. Högberg, and L. Hultman, Thin Solid Films 478, 34 (2004).
55. N. Hellgren, M. P. Johansson, B. Hjörvarsson, E. Broitman, M. Östblom, B. Liedberg, L. Hultman, and J.-E. Sundgren, J. Vac. Sci. Technol. A 18, 2349 (2000).
56. W. J. Gammon, O. Kraft, A. C. Reilly, and B. C. Holloway, Carbon 10, 1917 (2003).
57. J. Neidhardt, Zs. Czigány, and L. Hultman, Carbon 42, 2729 (2004).
58. S. E. Rodil, Recent Res. Dev. Appl. Phys. 6, 391 (2003).
59. N. Hellgren, J. Guo, C. Sthe, A. Agui, J. Nordgren, Y. Luo, H. Ågren, and J.-E. Sundgren, Appl. Phys. Lett. 76, 4348 (2001).
60. N. Hellgren, Thin Solid Films 471, 19 (2005).
61. W. J. Gammon, Doctoral thesis, College of William and Mary, 2003.
62. N. Hellgren, J. Mater. Res. 16, 3188 (2001).
63. G. Abrasonis, R. Gago, M. Vinnichenko, U. Kreisig, A. Kolitsch, and W. Möller, Phys. Rev. B 73, 125427 (2006).
64. A. C. Ferrari, S. E. Rodil, and J. Robertson, Phys. Rev. B 67, 155306 (2003).
65. L. Hultman, S. Stafström, Zs. Czigány, J. Neidhardt, N. Hellgren, I. F. Brunell, K. Suenaga, and C. Colliex, Phys. Rev. Lett. 87, 225503 (2001).
66. J. Neidhardt, Doctoral thesis Linköping University, 2004.
67. C. M. Brown, L. Cristofolini, K. Kordatos, and K. Prassides, J. Am. Chem. Soc. 118, 8715 (1996).
68. W. J. Gammon, D. I. Malyarenko, O. Kraft, G. L. Hoatson, A. C. Reilly, and B. C. Holloway, Phys. Rev. B 66, 153402 (2002).
69. S. J. Townsend, T. J. Lenosky, D. A. Müller, C. S. Nichols, and V. Elser, Phys. Rev. Lett. 69, 921 (1992).
70. G. K. Gueorguiev, J. Neidhardt, S. Stafström, and L. Hultman, Chem. Phys. Lett. 410, 228 (2005).
71. J. Neidhardt, B. Abendroth, R. Gago, W. Möller, and L. Hultman, J. Appl. Phys. 94, 7059 (2003).
72. G. Abrasonis, R. Gago, I. Jimenez, U. Kreissig, A. Kolitsch, and W. Möller, J. Appl. Phys. 98, 074907 (2005).
73. K. J. Boyd, D. Marton, S. S. Todorov, A. H. Al-Bayati, J. Kulick, R. A. Zuhr, and J. W. Rabalais, J. Vac. Sci. Technol. A 13, 2110 (1995).
74. J. Vlček, K. Rusnak, V. Hejek, and L. Martinu, J. Appl. Phys. 86, 3646 (1999).
75. N. Hellgren, M. P. Johansson, E. Broitman, P. Sandström, L. Hultman, and J.-E. Sundgren, Thin Solid Films 382, 146 (2001).
76. R. Kaltofen, T. Sebald, and G. Weise, Thin Solid Films 290-291, 112 (1996).
77. A. A. Voevodin, J. G. Jones, Zs. Czigány, L. Hultman, and J. S. Zabinski, J. Appl. Phys. 92, 4980 (2002).
78. S. S. Todorov, D. Marton, K. J. Boyd, A. H. Al-Bayati, and J. W. Rabalais, J. Vac. Sci. Technol. A 12, 3192 (1994).
79. J. Neidhardt, H. Högberg, and L. Hultman, Thin Solid Films 478, 34 (2005).
80. G. K. Gueorguiev, J. Neidhardt, S. Stafström, and L. Hultman, Chem. Phys. Lett. 401, 288 (2005).
81. H. Riascos, J. Neidhardt, G. Z. Radnoczi, J. Emmerlich, G. Zambrano, L. Hultman, and P. Prieto, Thin Solid Films 497, 1 (2006).
82. R. Gago, M. Vinnichenko, J. Neidhardt, U. Kreissig, Zs. Czigany, L. Hultman, A. Kolitsch, and W. Möller, Thin Solid Films 483, 89 (2005).
83. R. P. Webb and M. Kerford, Nucl. Instrum. Methods Phys. Res. B 180, 32 (2001).
84. Ya. M. Soifer, N. P. Kobelev, and V. M. Levin, J. Alloys Compd. 310, 292 (2000).
85. A. V. Talyzin, L. S. Dubrovinsky, M. Od́n, and U. Jansson, Diamond Relat. Mater. 10, 2044 (2001).
86. J. F. Shackelford, Introduction to Materials Science for Engineers (Prentice-Hall, Englewood Cliffs, NJ, 2000).
87. R. F. Bunshah, Handbook of Hard Coatings (Noyes, Park Ridge, NJ, 2001).
88. H. Sjöström, L. Hultman, J.-E. Sundgren, S. V. Hainsworth, T. F. Page, and G. S. A. M. Theunissen, J. Vac. Sci. Technol. A 14, 56 (1996).
89. N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J.-E. Sundgren, Phys. Rev. B 59, 5162 (1999).
90. L. Hultman, J. Neidhardt, N. Hellgren, H. Sjöström, and J.-E. Sundgren, Mater. Res. Bull. 28, 194 (2003).
91. S. J. Bull, Diamond Relat. Mater. 4, 827 (1995).
92. A. Grill and V. Patel, Diamond Relat. Mater. 2, 597 (1993).
93. E. C. Cutiongco, D. Li, Y.-W. Chung, and C. S. Bhatia, J. Tribol. 118, 543 (1996).
94. See, for example, US04664976, US05630275, US5232570, US05855746, and JP61174377A2.
95. E. Broitman, Wear 248, 55 (2001).
96. J. M. Molina-Aldereguia, S. J. Llloyd, M. Oden, T. Joelson, L. Hultman, and W. J. Clegg, Philos. Mag. A 82, 1983 (2002).
97. J. A. Greenwood and J. B. P. Williamson, Proc. R. Soc. London, Ser. A 295, 300 (1966).
98. N. Schwarzer, Surf. Coat. Technol. 133, 397 (2000).
99. E. Broitman, W. Macdonald, N. Hellgren, G. Radnoczi, Z. Czigany, A. Wennerberg, M. Jacobsson, and L. Hultman, Diamond Relat. Mater. 9, 1984 (2000).
100. I. M. Hutchings, Friction and Wear of Engineering Materials (Edward Arnold, London, UK, 1992).
101. I. L. Singer, S. D. Dvorak, K. J. Wahl, and T. W. Scharf, J. Vac. Sci. Technol. A 21, 232 (2003).
102. J. Neidhardt, Doctoral thesis, Institute of Technology, Linköping University, 2004.