Electrical properties of carbon nitride thin films: Role of morphology and hydrogen content

Journal of Electronic Materials

Volumn 31, Issue 9, 2002, Pages L11-L15

  Broitman, E ^a   Hellgren, N ^b   Neidhardt, J ^c   Brunell, I ^d   Hultman, L ^c  

^a The College of William and Mary   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c LINKÖPING UNIVERSITY   (Sweden)

^d CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Carbon nitride; Electrical properties; Film; Sputtering

Indexed keywords

CHEMICAL BONDS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON MOBILITY; GRAPHITE; HYDROGEN; MICROSTRUCTURE; MORPHOLOGY; THIN FILMS;

CARBON NITRIDE THIN FILMS;

CARBON NITRIDE;

EID: 0036740289     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0190-8     Document Type: Article

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