Synthesis of carbon nitride thin films by low-energy ion beam assisted evaporation: On the mechanisms for fullerene-like microstructure formation

Thin Solid Films

Volumn 483, Issue 1-2, 2005, Pages 89-94

  Gago, R ^a,e   Neidhardt, J ^b   Vinnichenko, M ^a,c   Kreissig, U ^a   Czigany Zs ^d   Kolitsch, A ^a   Hultman, L ^b   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b LINKÖPING UNIVERSITY   (Sweden)

^c TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV   (Ukraine)

^d RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^e CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

Author keywords

Carbon nitride; Fullerene like materials; Growth mechanisms; IBAD

Indexed keywords

CARBON NITRIDE; DESORPTION; EVAPORATION; FILM GROWTH; FULLERENES; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; MICROSTRUCTURE; SUBSTRATES; SYNTHESIS (CHEMICAL);

FULLERENE-LIKE (FL) MICROSTRUCTURE; FULLERENE-LIKE MATERIALS; GROWTH MECHANISM; REACTIVE MAGNETRON SPUTTERING (MS);

THIN FILMS;

EID: 18844428823     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.12.027     Document Type: Article

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