Structural and mechanical properties of carbon nitride CNx (0.2≤x≤0.35) films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 56-62

  Sjostrom H ^a   Hultman, L ^a   Sundgren, J E ^a   Hainsworth, S V ^b   Page, T F ^b   Theunissen, G S A M ^c  

^a LINKÖPING UNIVERSITY   (Sweden)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030538517     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579880     Document Type: Article

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