Mechanical properties of d.c. magnetron-sputtered and pulsed vacuum arc deposited ultra-thin nitrogenated carbon coatings

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1024-1029

  Wienss, A ^a   Neuhauser M ^a   Schneider, H H ^a   Persch Schuy, G ^a   Windeln, J ^a   Witke, T ^b   Hartmann, U ^c  

^a IBM   (Germany)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^c SAARLAND UNIVERSITY   (Germany)

Author keywords

Amorphous carbon; Mechanical properties; Raman spectroscopy; Ultrasonic measurements

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELASTIC MODULI; MAGNETIC DISK STORAGE; MAGNETRON SPUTTERING; RAMAN SCATTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

ULTRA-THIN COATINGS;

COATINGS;

CARBON NITRIDE; DISK DRIVE; INORGANIC COATING; MECHANICAL PROPERTY;

EID: 0342467938     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00512-4     Document Type: Article

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