Experimental comparison of N(1s) X-ray photoelectron spectroscopy binding energies of hard and elastic amorphous carbon nitride films with reference organic compounds

Carbon

Volumn 41, Issue 10, 2003, Pages 1917-1923

  Gammon, W J ^a   Kraft, O ^b   Reilly, A C ^a   Holloway, B C ^a  

^a The College of William and Mary   (United States)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

A. Carbon films; B. Plasma sputtering; C. X ray photoelectron spectroscopy; D. Chemical structure, Mechanical properties

Indexed keywords

AMORPHOUS FILMS; BINDING ENERGY; CHEMICAL BONDS; ELASTIC MODULI; INDENTATION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PLASMA SPRAYING; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS; VACANCIES;

CARBON NITRIDE;

EID: 0037811389     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(03)00170-2     Document Type: Article

References (19)

1. Hellgren N., Johansson M.P., Broitman E., Hultman L., Sundgren J.E. Phys. Rev. B. 59:1999;5162.
2. Holloway B.C., Kraft O., Shuh D.K., Nix W.D., Kelly M., Pianetta P., Hagstrom S. J. Vac. Sci. Technol. A. 18:2000;2964.
3. Marton D., Boyd K.J., Al-Bayati A.H., Todorov S.S., Rabalais J.W. Phys. Rev. Lett. 73:1994;118.
4. Ronning C., Feldermann H., Merk R., Hofsass H., Reinke P., Thiele J.U. Phys. Rev. B. 58:1998;2207.
5. Spaeth C., Kuhn M., Richter F., Falke U., Hietschold M., Kilper R., Kreissig U. Diamond Related Mater. 7:1998;1727.
6. Zheng W.T., Sjostrom H., Ivanov I., Xing K.Z., Broitman E., Salaneck W.R., Greene J.E., Sundgren J.E. J. Vac. Sci. Technol. A. 14:1996;2696.
7. Sjostrom H., Stafstrom S., Boman M., Sundgren J.-E. Phys. Rev. Lett. 75:1995;1336.
8. Gammon W.J., Malyarenko D.I., Kraft O., Hoatson G.L., Reilly A.C., Holloway B.C. Phys. Rev. B. 66:2002;153402.
9. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
10. Brotzen F.R. Int. Mater. Rev. 39:1994;24.
11. Souto S., Pickholz M., Dos Santos M.C., Alvarez F. Phys. Rev. B. 57:1998;2536.
12. Proctor A., Sherwood M.A. Anal. Chem. 54:1982;13.
13. Boutique J.P., Verbist J.J., Fripiat J.G., Delhalle J., Pfister-Guillouzo G., Ashwell G.J. J. Am. Chem. Soc. 106:1984;4374.
14. Johansson A., Stafstrom S. J. Chem. Phys. 111:1999;3203.
15. Jiangtao H., Peidong Y., Lieber C.M. Phys. Rev. B. 57:1998;R3185.
16. Snis A., Matar S.F., Plashkevych O., Agren H. J. Chem. Phys. 111:1999;9678.
17. Snis A., Matar S.F. Phys. Rev. B. 60:1999;10855.
18. Pels J.R., Kapteijn F., Moulijn J.A., Zhu Q., Thomas K.M. Carbon. 33:1995;1641.
19. Casanovas J., Ricart J.M., Rubio J., Illas F., Jimenez-Mateos J.M. J. Am. Chem. Soc. 118:1996;8071.