Silicon carbonitride: A rival to cubic boron nitride

Diamond and Related Materials

Volumn 7, Issue 10, 1998, Pages 1519-1525

  Badzian, A ^a   Badzian, T ^a   Drawl, W D ^a   Roy, R ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Hard materials; Microwave nitrogen plasma; Silicon carbonitride; Ternary phases

Indexed keywords

ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; LIGHT ABSORPTION; MICROWAVES; NITROGEN; PHASE COMPOSITION; PLASMA APPLICATIONS; SYNTHESIS (CHEMICAL);

HARD MATERIALS; MICROWAVE NITROGEN PLASMA; SILICON CARBONITRIDE; TERNARY PHASES;

SILICON NITRIDE;

HARDNESS; SILICON ALLOY;

EID: 0032194321     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(98)00228-3     Document Type: Article

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