Carbon and carbon nitride planar waveguides on silicon substrates

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 628-630

  Huttel, I ^a   Gurovic, J ^b   Cerny, F ^b   Pospisil, J ^b  

^a INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^b CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

Carbon nitride; IR absorption spectroscopy; PECVD carbon coating; Planar waveguide

Indexed keywords

ABSORPTION SPECTROSCOPY; ATTENUATION; CARBON; ELECTROMAGNETIC SHIELDING; INFRARED SPECTROSCOPY; NITRIDES; OPTICAL COATINGS; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS;

CARBON NITRIDE; OPTICAL SHIELDING; PLANAR WAVEGUIDE;

OPTICAL WAVEGUIDES;

EID: 0032607045     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00408-7     Document Type: Article

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