Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Wear

Volumn 248, Issue 1-2, 2001, Pages 55-64

  Broitman, E ^a   Hellgren, N ^a   Wanstrand O ^b   Johansson, M P ^a,c   Berlind, T ^a   Sjostrom H ^d   Sundgren, J E ^e   Larsson, M ^b   Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

^c Thin Film Electronics AB   (Sweden)

^d Sjöstrom Coating Consulting   (Sweden)

^e CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Magnetron sputtering; Mechanical properties; Tribological properties

Indexed keywords

ARGON; COATINGS; ELASTICITY; FRICTION; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PLASMAS; STEEL; SUBSTRATES;

WEAR RATES;

CARBON NITRIDE;

FILM; MICROSTRUCTURE; SPUTTERING; TRIBOLOGY; WEAR RESISTANCE;

EID: 0035280592     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(00)00519-6     Document Type: Article

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